Exclusive Thermal Wafer Chuck Systems

At Micromanipulator we not only design, engineer and manufacture the highest quality and range of probe stations, but also offer our customers the best selection of accessories.  Our accessories include our top-rated thermal wafer chuck systems that allow you the opportunity to configure your probe station to meet performance, budget and probing application requirements. 

Our exclusive wafer chucks offer a range of features such as rapidly heating up and cooling down; minimizing expansion into the probes; maintaining incredible planarity over temperature changes with our Frictionless Kinematic Mount; and minimizing heat radiation into the stage to prolong prober life.   Micromanipulator’s hot chuck systems support wafer testing from -65 to 400 degrees and are available with a choice of the heating power supply.  We recommend an AC heating supply for customers that need fast heating and do not require chuck noise in the femtoamp level.   If you need to achieve the lowest level measurements, go with our DC power supply.  All of our hot chucks are capable of supporting 150 to 300 mm wafers in coaxial or triaxial configurations.

If you want the most economical cooling for above ambient testing, we suggest the C1000 simple heat exchange (HE) option that offers the benefit of rapid cooling of the chuck after the heat cycle is finished.  If you need to test to zero degrees and want the best performance in holding temperatures at room ambient temperatures, you will want to take a look at our C1000 zero degree cooling option.  Finally our line-up includes the HC1000 high performance cooling system.  It is specifically designed to handle testing for temperatures as low as -65 degrees C.   For all the information regarding our thermal wafer chucks as well as our other high-quality accessories, please see our website or contact one of our engineers. 

Micromanipulator not only invented analytical probing in 1956 but we are the leading name in the field. We reliably deliver the tools and life cycle support the semiconductor industry depends on. Part of our company’s philosophy and what drives our success is an unfaltering commitment to our customers’ satisfaction. We offer the most comprehensive range of accessories available anywhere including our exclusive H1000 series thermal wafer chuck.        

Reliable at Every Stage

One of the things Micromanipulator is proud of is the fact that our probe stations, probe tips and accessories are products that customers have reliably counted on for years to deliver optimal performance.  As early pioneers in the analytical probing field, we bring 60 years of experience to give customers state-of-the-art products that are expertly designed, engineered, manufactured and meticulously tested.  In addition, not content to rest on our past successes, we use our extensive experience to improve upon our current line of products as well as develop brand new ones.    

As a Micromanipulator customer, you will find plenty to choose from with our 16 models of probe stations and a wide assortment of well-designed accessories to meet your every need.  Our exceptional selection of probe stations is the largest on the market and includes Specialty, Semi-automatic, High-performance, General-purpose Manual, and Economy Manual models.  Once you have determined which model of probe station works best for your application, you can shop our line of accessories to outfit it.  Here you will discover the highest quality of thermal chucks, microscopes, vibration isolation, light and noise shields, manipulators and DC and RF measurement hardware in the industry.

Furthermore, when you buy from Micromanipulator you can rest assured that we will assist you throughout the whole process.  To accomplish that we offer what we call our “Full Life-Cycle Support” that starts from concept, to production, right through to maintenance.  With a worldwide network of service support engineers, we provide system level support to keep you operating at maximum performance.  Also with extended warranties, preventative maintenance programs and upgrade paths even for obsolete tools, you can feel confident your investment is well-protected.   

Micromanipulator not only invented analytical probing in 1956 but we remain the top name in the field.  As such we reliably deliver the tools and life cycle support the semiconductor industry depends on.  Part of our company’s philosophy and what drives our success is an unfaltering commitment to our customers’ satisfaction.  Contact us to learn more about our top-of-the-line probe stations.        

Meet One of Our Newest Probe Stations

One of the newest probe stations in Micromanipulator’s extensive line-up is our patent pending 2210-LS that is the world’s first true system level probe station with above and below ambient temperature capabilities.  The 2210-LS model combines the traditional wafer probe to the device exercising capabilities of the application board, and was specifically designed to help development teams working with post tape-out product spins.  In addition, extensive application coverage is provided including basic DC, to E and K-Band analysis.

Our new probe station is loaded with features such as an open and stable platform for high magnification sample viewing and probing.  Users are able to probe at the application board block or at system level while exercising their chip in mission mode.  Furthermore, you can easily trace and analyze issues that manifest only in the actual end application environment.  Examples of this include: power issues; inter-block device interface and tolerance issues; and between-block issues such as mixed-signal interface.  Also users can analyze race conditions and clocking domain. 

With flexible setups, temperature and ambient versions and comprehensive accessory support available, the new 2210-LS station is an excellent choice for many applications.  Our 30” x 36” optical vibration isolation table accommodates application boards measuring approximately 26” square and two independently moveable stainless steel platens accommodate up to 10 individual probe positioners. 

Other options available for Micromanipulator’s 2210-LS include removable ambient and thermal chucks for wafer level probing needs, stereo zoom and compound microscopes, CCD and video monitor options and shroud enclosure for light shielding.  Furthermore, it offers our patent-pending Application Board Thermal Test Capability accommodating application boards up to 10” x 10”.  See our website for all of the details regarding our 2210-LS probe station along with our other models and products.   

At Micromanipulator we not only invented analytical probing in 1956 but remain the leading name in the field.  As such we reliably deliver the tools and life cycle support the semiconductor industry depends on.  Part of the company’s philosophy and what drives our success is an unfaltering commitment to our customers’ satisfaction.  Contact us to learn more about our exceptional line of probe stations and accessories.