H1000 Series Thermal Wafer Chuck

At Micromanipulator we are pleased to offer our customers smartly-designed, high-tech accessories.  One such product is our exclusive H1000 series thermal wafer chuck, which provides system users with the best planarity and lowest noise.  We are also proud of the fact that it offers the lowest cost of ownership on the market.  The H1000 supports wafer testing from -65 to 400 degrees C, and is available in several configurations to meet your application requirements as well as budget.

Options for the thermal chuck include a choice of two power supplies.  The AC heating power supply is designed for fast heating and for applications that do not require chuck noise in the femtoamp level.  Our DC heating supply is the appropriate choice when you need to achieve the very lowest noise levels. 

Our C1000 simple heat exchange (HE) option also offers customers the most economical cooling for above ambient testing.  Once the heat cycle is finished, the wafer chuck rapidly cools down.  For testing to zero degrees**, choose the zero degree option of the C1000.  This gives users the best performance in holding temperatures at room ambient temperatures. 

Our thermal wafer chucks are designed to work with all control options.  Other highlights include: rapidly heating up and cooling down; minimizing expansion into the probes; maintaining incredible planarity over temperature changes with our Frictionless Kinematic Mount; and minimizing heat radiation into the stage to prolong prober life.   Our hot chucks support 150 to 300 mm wafers in coaxial or triaxial configurations. 

Please see our website or contact one of our engineers to learn more about our line of probe stations and high-quality accessories.  We are constantly reviewing and improving our products and are always happy to hear feedback from our customers in order to continue to design products that meet their needs. 

Micromanipulator not only invented analytical probing in 1956 but we remain the leading name in the field. From concept, to production, right through to maintenance, our exclusive Full Life-Cycle Support guarantees customers’ success with our high-tech tools.  Please contact us to find out more about our wide range of probe stations, accessories and consumables.        

Helpful Guidelines for Successful Low Level Measurements

Micromanipulator wants our customers to succeed, which is why we design high-quality products for a wide range of applications.  We also understand it is important to provide information on each product and to be available to answer our customers’ questions.  For technical details and troubleshooting, we offer a variety of pdfs and Application Notes.   

One of our Application Notes deals with “The Basics of Low Current Probing.”  Included in the comprehensive discussion are common problems users run into with low current probing, and suggestions for how to solve them.  The document summarizes a list of helpful guidelines for successful low level measurements. 

We start by reminding users to pay attention to details as the nature of the very small physical values being observed mean there are a variety of factors that can interfere with the desired measurements.  Micromanipulator’s experts recommend getting into the habit of reviewing and practicing preventive measures to eliminate problems before they occur. 

We also offer a tip on how to diagnose noise sources and to minimize their effects.  Since analog time domain measurement techniques are not readily available for direct observation at femtoampere levels, this can be challenging.  One of our suggestions is to use a parametric tester that is configured to provide a sampled sweep of current versus time with a constant source voltage. 

Another area we discuss is system grounds, shields and connections.  We provide a couple diagrams that show the ideal grounding, shielding and connection scheme for surface to surface and surface to substrate current measurements. 

You will also find information regarding exploit filtering and averaging available in the instrument.  We suggest parametric measurements such as subthreshold and TDDL that lend themselves to filtering and averaging.  In addition our guidelines handle topics such as guarding and settling time, cable isolation and noise, and cleanliness.  See our website to read the full report and to see our full line of high-quality probe stations and accessories. 

Micromanipulator not only invented analytical probing in 1956 but we are leaders in the field and reliably deliver the tools and life cycle support the semi-conductor industry depends on. Our company’s philosophy and what drives our success is an unfaltering commitment to our customers’ satisfaction. Please contact us to learn more about our wide range of probe stations and accessories. 

We Offer an Active Product Upgrade and Trade-in Program

Along with our commitment to produce probe stations that meet our customers’ application and budget needs, we also offer an opportunity to upgrade your present machine with one of our newer models.  We recognize that needs change which is why we support an active product upgrade and trade-in program.  In addition our upgrade paths are even available for obsolete tools so it is much easier than you may have thought to take advantage of some of the newer advancements in the field and get the features you need. 

Furthermore, for those on a limited budget these trade-ins along with demonstration products are offered for sale at a significate discount.  All of these tools come with a factory warranty and support just as our new products do. Please check our website for the current offering of used tools and if you don’t see the model you want, contact us.  We might have what you are looking for! 

Micromanipulator is the leading manufacturer of probe stations and with 16 different models to choose from and new products currently under development, you are certain to find a system perfect for your requirements.  In fact we are proud to offer our customers the most comprehensive selection of high-quality probe stations and accessories available on the market today. 

Our selection includes Manual, Motorized, or Semiautomatic models that offer a variety of different price points to match both budget and application needs.  We develop and produce an extensive list of consumables and accessories so you can determine how best to outfit your station. Your choice includes Micromanipulator’s high-quality thermal chucks, microscopes, vibration isolation, light and noise shields, manipulators, DC and RF measurement hardware. 

Micromanipulator not only invented analytical probing in 1956 but we remain the leading name in the field. From concept, to production, right through to maintenance, our exclusive Full Life-Cycle Support guarantees customers’ success with our high-tech tools.  Please contact us to find out more about our wide range of probe stations, accessories and consumables.        

Our Probe Stations Offer Optimal Performance

Regardless of what your probing requirements are, Micromanipulator has a high-quality probe station that will suit your needs.  We proudly offer one of the largest selections on the market along with a wide assortment of consumables, accessories and on-site support. 

We make it easy to shop for one of our Specialty, Semi-automatic, High-performance, General-purpose Manual, and Economy Manual probe stations by providing comprehensive specifications and details on each model.  This enables you to find a probe station that meets your technical needs as well as your price range and personal preferences.  You will discover models such as our 2210 LS, the world’s first true system level probe station with above and below ambient temperature capabilities to our reliable Economy 450PM Manual station.   Furthermore, you can feel confident buying any of our products as they all come with factory warranties and support.    

Our website also offers a printable brochure highlighting the various features and benefits of the probe stations.  We include practical information such as the test station dimensions and X-Y stage movement along with the full range of accessories and options available including: probe card holders, light tight enclosures, thermal chucks, video accessories, manual / motorized manipulators. 

System users will find our extensive selection of probe stations are designed for applications such as: high frequency up to 200GHz; C-V measurements; sub-micron probing; ESD wafer level testing; laser cutting; and high power device analysis.  In addition our areas of expertise include: low current / low noise measurement; failure analysis; high and low temperature characterization; device reliability analysis - Interconnect, EM, HCI, Charge Pumping, NBTI, PBTI, TDDB; and high speed digital analysis. 

We are an American-based company with state-of-the-art design, test, and manufacturing capabilities, and produce our entire line of probe stations and accessories at our Carson City, Nevada headquarters.  Please visit our website or give our engineers a call for more information.  

Micromanipulator not only invented analytical probing in 1956 but we are leaders in the field and reliably deliver the tools and life cycle support the semi-conductor industry depends on. Our company’s philosophy and what drives our success is an unfaltering commitment to our customers’ satisfaction. For one of the most comprehensive selections of probe stations, consumables and accessories on the market, please visit our website.           

Probe Holders Designed for a Variety of Applications

One of the reasons we design and manufacture so many different probe holders is our customers tell us what they need, and we produce the products to fulfill those needs.  You will find our lineup of probe holders is one of the most comprehensive on the market.  Our holders address a broad range of application requirements including: general purpose DC characterization, high speed, wide bandwidth, low current and high power.  Also by producing such a variety of products, our users have the opportunity to choose a holder based on their measurement equipment interface requirements or application demand as well as budget and personal preference. 

The Model 44, one of our single unit holders, offers so many options and configurations it is virtually a custom probe.  Features include a frequency range from DC to 3 GHz; low level signal testing; 50-ohm circuit testing; CV testing; and Kelvin force, and sense and single wire configurations.  This economical probe is appropriate for the most common microwave test and has coaxial shielding that extends from the cable connection through the body of gold plated brass to the tungsten probe point.

Micromanipulator’s high attack angle probe holders, models 75-80, are designed for hot stage probing and are ideal for applications where probing is difficult due to thermal expansion or vibration. While the holders accept any Model 7 point, they are specifically designed to be used with high compliance points such as models 7F, 7F-10, 7F-C10, and 7S.  Please keep in mind that because these probe holders have a high angle of attack, the probe point must be approximately 3/8” below the holder in order to be visible.  This means any compound microscope objectives with a working distance of less than 1/2 inch (12.5 mm) may not be feasible.   

Our probe holders are also available in a variety of versions including coaxial or triaxial, high frequency, active, high/low temperature, high power and low profile.  Please see our Probe Tip and Probe Holder Reference Manual to learn more details and specifications about our full line of exceptions probe tips and holders.

As early pioneers in the analytical probing field, we bring 60 years of experience to give customers state-of-the-art products that are expertly designed, engineered, manufactured and meticulously tested. In addition, our commitment to customers’ satisfaction includes “Full Life-Cycle Support” that starts from concept, to production, right through to maintenance.  Contact us to learn more about our exceptional line of probe stations and accessories.

An Impressive Selection of Semi-automatic Probe Stations

At Micromanipulator we are proud to offer our customers a selection of semi-automatic probe stations designed for a broad range of applications.  Our semi-automatic models include the P200L (200mm), P200A (200mm), P300L (300mm), and P300A (300mm). 

Standard features on our reliable, precision-engineered P200L include single-point ground and integrated thermal chuck plumbing and features leadscrew-leadnut stage and platen drives and a stainless steel platen with removable front wedge.   The P200L is designed for semiautomatic applications on 200mm wafers and offers a high stability microscope bridge to support high resolution, long-working distance microscopes.  Along with a low acquisition cost and ease of use, the economical probe station allows for joystick operation of the station stage, platen, and microscope.

Our P200A model provides system users with the highest performance 200mm semiautomatic probe station on the market.  Standard features include a comprehensive software suite (our revolutionary netProbeTM), and the best low current, sub-micron and temperature probing performance.  In addition to offering comprehensive accessory support for the P200A, it is field upgradeable with hot and cold thermal chucks.

The P300L is the probe station of choice if you are looking for high performance, full capability and cost-effectiveness.  It is intended for semiautomatic applications on 300mm wafers and is low current ready.  The reliable P300L may be configured with a local dry / shielded / dark environment “Top Hat” for low level or low temperature, frost free probing.   In addition it has comprehensive accessory support and is field upgradable with hot and cold thermal chucks. 

Our model P300A is the highest performance 300mm semiautomatic probe station on the market.  It comes with a comprehensive software suite and offers the best low current, sub-micron, and temperature probing performance.  Along with being the most stable, intuitive, and space efficient 300mm semi-automatic analytical probe station on the market, the P300A features a single-point ground, dry/dark environment and integrated thermal chuck plumbing.  We offer a comprehensive line of accessories compatible with the field upgradeable probe station.  See our website for all of the specifications and features of our semiautomatics as well as the rest of our line of exceptional probe stations.

Micromanipulator not only invented analytical probing in 1956 but we are leaders in the field and reliably deliver the tools and life cycle support the semi-conductor industry depends on. Our company’s philosophy and what drives our success is an unfaltering commitment to our customers’ satisfaction. For one of the most comprehensive selections of probe stations, consumables and accessories on the market, please see our website.           

Sixty Years and Going Strong

Right from the beginning, Micromanipulator took a leading role in the semiconductor industry with cutting edge technologies and innovations. It was in 1956 when we first invented analytical probing, and since then we have increased our reach to include countries throughout Asia, Europe, the Middle East and South America.  Never content to rest on our past successes, we continually use our vast experience to improve upon our current line of products and develop new ones.   

By combining sixty years of analytical probing experience with state-of-the-art design, we have the capability to provide customers with the best products on the market. With 16 different models, Micromanipulator offers the most comprehensive selection of probe stations available.  In addition, our exceptional line-up of consumables and accessories are expertly designed, tested and manufactured to meet application requirements, budget demands and personal preferences.  We have a wide range of thermal chucks, probe holders and tips, manipulators, unique probe holders, vibration isolation tables, camera systems and more.

At Micromanipulator, we have always measured our success by that of our customers.  Our unique approach to customer satisfaction includes our “Full Life-Cycle Support” that starts from concept, to production, right through to maintenance.  Our worldwide network of service support engineers support the entire system from optics to thermal chucks.  To ensure your investment is protected, we offer extended warranties, preventative maintenance programs, and upgrade paths for current or obsolete tools.

For information regarding our probe stations as well as our other high-quality accessories, please see our website or contact one of our engineers. 

Micromanipulator not only invented analytical probing but we are the leading name in the field. We reliably deliver the tools and life cycle support the semiconductor industry depends on. Part of our company’s philosophy and what drives our success is an unfaltering commitment to our customers’ satisfaction. Please contact us to find out more about our exceptional line of products.

The Best High-Tech Tools for Semiconductor Professionals

If you would like to buy the same, high-quality tools used by semiconductor professionals throughout the world, you have come to the right place.  For sixty years, the experts at Micromanipulator have been designing, engineering, and manufacturing high-tech solutions for virtually every testing requirement as well as providing our exclusive Full Life-cycle Support.   

To get an idea of what we are talking about, we encourage you to browse through our large selection of manual, semi-automatic, high performance, specialty and manual-motorized probe stations featured on our website.  Within each of these categories, we list detailed specifications of the various models to allow you to compare: wafer sizes, control accessory options and target applications.  In addition we offer important information regarding the cost-effectiveness and value of our products.         

Furthermore, we proudly design and produce in-house one of the most extensive lines of high-quality accessories and options.  Micromanipulator offers: microscopes, chucks, single die or wafer pieces holders, control methods, probe card holders, vibration isolation, laser cutting, micro-motion analysis, video and image enhancement systems, light/EMI/RFI enclosures, and emission microscope systems.  Also keep in mind, if you do not see what you need, check with us to find out more about our customized options. 

Right from the start, our corporate philosophy has been to listen and learn from our customers, and the fact that we are still in business sixty years later, shows it has paid off.  Feedback from our customers is vital to our success and allows us to continue to design the cutting-edge tools required by an ever-evolving industry.  Our products are designed for a broad range of applications including: failure analysis; characterization and modeling; reliability testing; IV/CV testing; low current; high voltage/high current; high temperature/low temperature probing; and RF microwave.  We encourage you to check out our website or contact one of our experts for more information.

As early pioneers in the analytical probing field, we bring 60 years of experience to give customers state-of-the-art products that are expertly designed, engineered, manufactured and meticulously tested. In addition, our commitment to customers’ satisfaction includes “Full Life-Cycle Support” that starts from concept, to production, right through to maintenance.  Contact us to learn more about our exceptional line of probe stations and accessories.

Equip Your Probe Station for Your Preferences and Application Needs

At Micromanipulator, we work hard to ensure your new probe station provides the optimal performance for your probing needs.  With one of the largest selection of probe stations on the market and a wide assortment of consumables and accessories our customers are able to fully customize their new equipment.  In addition you will receive Micromanipulator’s “Full Life-Cycle Support,” which starts from concept, to production, and goes right through to maintaining your equipment. 

Our range of accessories include high-quality thermal chucks, microscopes, vibration isolation, light and noise shields, a selection of manipulators, DC and RF measurement hardware, all types of probe card holders, and camera systems.  By offering such a wide selection, we make it easy to equip your station to suit personal preferences as well as your application needs. 

Our expertly designed consumables include passive probe holders, active probe holders, high frequency probe holders and probe tips.  We design all of these products with extreme care as we know that the right accessories are critical for your application, and we work hard to offer the best products on the market. 

Our exclusive wafer chucks offer a range of features such as rapidly heating up and cooling down; minimizing expansion into the probes; maintaining incredible planarity over temperature changes with our Frictionless Kinematic Mount; and minimizing heat radiation into the stage to prolong prober life.  Micromanipulator’s hot chuck systems support wafer testing from -65 to 400 degrees and are available with a choice of the heating power supply.

We encourage you to visit our website to learn more about our products.  Even though it is filled with detail and specifications, if you do not see the information you need, give us a call and our engineers will gladly answer your questions. 

Micromanipulator not only invented analytical probing in 1956 but we remain the leading name in the field. Part of our company’s philosophy and what drives our success is an unfaltering commitment to our customers’ satisfaction. With a worldwide network of service support engineers, we provide system level support to keep you operating at maximum performance.

Model 79 Probe Holder is One of Our Most Popular

Micromanipulator is proud of our line of high-quality consumables and accessories that are designed as a part of our systems approach to integration with our probe stations.  One example is our excellent selection of probe tips and probe holders that allow users to choose accessories that meet their measurement equipment interface requirements, application demands and personal preferences as well as budget.  We design, test and manufacture probe holders for a range of applications from general purpose DC characterization, high speed, and wide bandwidth to low current and high power. 

For example, Micromanipulator’s high attack angle holders are designed for hot stage probing and other applications where thermal expansion or vibration can make probing difficult.  Both our standard temperature and high temperature application probe holders offer systems users a choice of styles.    

Among our lineup includes one of our most popular probe holders, the Model 79.  It offers users the option of a standard attack angle or on-axis probe clamps that allow the probe tip to exit straight from the probe holder’s end.  Featuring a set screw closure, it is perfect for very low profile probing.  System users can bend the tip to the correct angle by hand or use one of our pre-bent probe tips, available in 45 or 60 degree attack angles.  This on-axis configuration is available for all Model 79 probe holders. 

The Model 79 Coaxial version is designed for applications including high frequency, low level signal testing, CV testing, and Kelvin force as well as sense and single wire configurations.  Our Model 79 also comes in a Triaxial model that is ideal for applications optimized for low current, fA level measurements, and Kelvin force along with sense and single wire configurations. 

To learn more about our range of probe holders and probe tips, please see our website.  And remember that while Micromanipulator provides comprehensive information online, our engineers are more than happy to answers your questions.  Contact us online via our site or give us a call.    

At Micromanipulator, we not only invented analytical probing in 1956 but are still the top name in the field.  From concept, to production, right through to maintenance, our exclusive Full Life-Cycle Support guarantees customers’ success with our high-tech tools.   Please contact us to learn more about our wide range of probe stations and accessories.

Highly Experienced “Solutions Engineering”

At Micromanipulator our team is invested in designing, testing and manufacturing a range of probe stations as well as smartly designed consumables and accessories to meet our customers’ every need.  Right from our company’s start, we have measured our success by the success of our customers.  This philosophy is at the heart of Micromanipulator, and core to our corporate values as well as the motivation that drives our business. 

We make a point of actively listening and learning from our customers, and then taking that information to produce the type of creative solutions our customers require.  It is one of the reasons we offer such a large selection of wafer probers ranging from Specialty, Semi-automatic, and High-performance to our General-purpose Manual and Economy Manual models.  It is also why we continue to research and develop our line of exclusive accessories and consumables.

Micromanipulator’s “solutions engineering” is responsible for creating probe stations that place the burden of performance on system operators, allowing them to focus on their data, not the prober.  We also provide the industry with advanced technologies that incorporate a systems approach to integration for thermal management; vibration isolation; flexible, open architectures; and materials selections.   

Our solutions engineering also includes producing the exclusive H1000 series thermal wafer chuck that leads the wafer probing industry with the best planarity, lowest noise, and lowest cost.  Our systems support wafer testing from -65 to 400 degrees C, and we offer several configurations to fit your application and budget.  Other examples of Micromanipulator listening to customers is realized in our line of high conductance probe tips (HCT) manufactured specifically to increase tip conductance, while at the same time reducing the probe scrub needed by a factor of 5 or more. 

As a customer of Micromanipulator, you will receive support services from our worldwide network of experience engineers who will provide “system level” support for your entire system from optics to thermal chucks.  Check out our website to learn more about how our services and products continue to set us apart from our competitors.      

Micromanipulator not only invented analytical probing in 1956 but we are leaders in the field and reliably deliver the tools and life cycle support the semi-conductor industry depends on. Our company’s philosophy and what drives our success is an unfaltering commitment to our customers’ satisfaction.