A Solution for Uncontrolled Movement When Using a Hot Stage

When probing with a hot stage at extremely elevated temperatures or when doing CV measurement, it can result in movement of a device under the probe as well as the probe point.  While this is typically due to thermal expansion, the uncontrolled movement causes the probe to slide or jump off its contact.  In fact research shows that for every 100 degree ºC temperature change, the movement may account for as much as one mil at any given location.  On a six or eight-inch wafer, it may affect the testing results.     

One of the goals of Micromanipulator has been to not only listen to our customer but to provide assistance with common and sometimes not so common problems encountered during the wafer probing process.  To deal with the occurrence of uncontrolled movement using a hot stage, we discuss the causes and effects of this problem along with offering an equipment solution in one of our Application Notes on our website’s “Support” tab. 

Our products represent the finest equipment available for probing small geometries, and in addition, we spend considerable energy working to solve a variety of application problems.  Micromanipulator’s research proves that the dilemma of maintaining probe contact during temperature stressing of wafers is mainly due to the relative motion between the fixed probe connected to manipulator and desired probe site on the wafer. 

Our solution is to recommend Micromanipulator’s model 7F probe that is designed with a high temperature, bendable shank and tip and offers the largest radius for probe contact as well as the shortest conical taper length.  Together these features can minimize the skating or slipping effect of the probe tip on the wafer site.  Please see our website for more information. 

Micromanipulator not only invented analytical probing in 1956 but we are the leading name in the field and reliably deliver the tools and life cycle support the semi-conductor industry depends on. Our company’s philosophy and what drives our success is an unfaltering commitment to our customers’ satisfaction. You will find one of the most comprehensive ranges of probe stations on the market as well the consumables, accessories and on-site support you need.        

Multi-versatile WAVE Manipulator

Among our impressive line of probe positioners that range from the budget-wise Model 110 to medium priced models with 7 possible set up and positioning adjustments, we offer our multi-versatile WAVE manipulator.  All of Micromanipulator’s probe positioners feature direct leadscrew/leadnut drives, ergonomic design and the highest stability.  Also regardless of which one you eventually choose, they offer seamless system integration with the probe station of your choice. 

Our high-quality “Wave” 100/200 series manipulators are available in multiple configurations and are designed for high frequency applications.  The probe positioner provides up to 200 GHz and is stabilized by your choice of vacuum or magnetic bases that are used to support the probe holder. 

The 5-axis control features X-Y and Z leadscrew-leadnut control along with theta and planarity controls for alignment of microwave, multi-probe or mini-probe cards including Celadon’s “Versa Tile” and coplanar probes.   The WAVE positioners offer a resolution of 40 TPI =1.7 µm with maximum travel of 12.7mm (0.5”) for each axis.  Furthermore, they have a theta and planarity range of 4 degrees.  The PLF/PLS link arm is adjustable up to 3 inches.

Along with our selection of probe positioners, Micromanipulator also designs, tests and manufactures a full range of probe holders.  Our customers know they can trust us to produce probe holders that not only meet measurement equipment interface requirements and application demands but also personal preferences and budget considerations.  Expertly designed holders are available with a choice of pin jack, spring load, or set screw tip insertion.  Also to ensure we can meet all test requirements, we offer single wire, coaxial, triaxial, coplanar, certified triax or Kelvin configurations.  Please see our website or contact us for more information. 

Micromanipulator not only invented analytical probing in 1956 but we remain the leading name in the field.  As such we reliably deliver the tools and life cycle support the semiconductor industry depends on.  As part of our company’s philosophy and what drives our success is an unfaltering commitment to customers’ satisfaction.  We invite you to contact us to find out more about our wide range of probe stations, accessories and consumables.        

The H1000 Series Chuck - Wafer Testing from -65 to 400 Degrees C*

At Micromanipulator we are proud to be at the forefront of providing customers with one of the best selections of waferchucks on the market.  In fact, our proprietary H1000 series thermal chuck leads the industry in offering the best planarity, lowest noise, and lowest cost of ownership.

While we know it is important to continue to design products for a broad range of specific applications, we also recognize that budget considerations are important to many of our customers.  This is why the exclusive H1000 series is available in a choice of configurations that addresses both application and budget needs.  The wafer chuck supports wafer testing from -65 to 400 degrees C and is an essential part of our comprehensive system integration for anyone of our high-quality probe stations. 

Some of the highlights of the H1000 series are your choice of either an AC heating power supply, which is best for applications that require fast heating without chuck noise in the femtoamp level.  If you need a chuck in the lowest noise level, we recommend going with the DC heating supply option.   

Also you can specify the cooling option that best fits your needs.  Micromanipulator’s C1000 simple heat exchanger (HE) is our most economical choice and is suitable for application requirements that only require high (above ambient) testing capabilities.  With this heat exchanger, users get a rapid cool down of the chuck to near room temperature once the heat cycle is complete.  If testing to zero degrees, you will want to get the C1000 zero degree option.  This heat exchanger offers users the best performance for holding temperatures around room ambient temperatures.   

Our third choice of heat exchangers is the high performance HC1000, which allows users to test at temperatures as low as -65* degrees C.  However, we do recommend the use of a prober integrated dry environment for low temperature applications in order to prevent condensation from impacting the measurement data, sample or prober stage.

Along with the rapid heat up and cool down features, the H1000 wafer chuck is also designed to minimize expansion into the probes.  In addition it maintains incredible planarity over temperature changes with our Frictionless Kinematic Mount, and at the same time, minimizes heat radiation into the stage to prolong prober life.  Please see our website or contact us for more information about our thermal wafer chucks.

At Micromanipulator, we not only invented analytical probing in 1956 but are still the top name in the field.  As such we reliably deliver the tools and life cycle support the semiconductor industry depends on.  A key part of our company’s philosophy and what drives our success is an unfaltering commitment to customers’ satisfaction.  Please contact us to learn more about our wide range of probe stations and accessories.