Hot Chuck Systems with Options

As an industry leader, Micromanipulator engineers and manufactures the best range of high-quality probe stations.  We also produce a wide variety of compatible accessories designed for our stations including hot chuck systems that offer the broadest available temperature range and the most advanced, non-operator dependent performance on the market. 

Micromanipulator’s thermal chuck systems support wafer configurations to fit your application and budget and offer features such as rapidly heating up and cooling down.  They will also minimize expansion into the probes; maintain incredible planarity over temperature changes with our Frictionless Kinematic Mount; and minimize heat radiation into the stage that helps to prolong your prober’s life.   

Our innovative hot chuck systems support wafer testing from -65 to 400 C degrees and come with a choice of a heating power supply.  If you need fast heating and do not require chuck noise in the femtoamp level, we suggest you chose an AC heating supply.  It is best to go with our DC power supply if you need to achieve the lowest level measurements.  Regardless of which one you choose, all of our hot chucks are capable of supporting 150 to 300mm wafers in coaxial or triaxial configurations.

We recommend the C1000 simple heat exchange (HE) option if you want the most economical cooling for above ambient testing as it offers the benefit of a rapid cooling of the chuck after the heat cycle is finished.  If you need to test to zero degrees, and require the best performance in holding temperatures at room ambient temperatures, your best choice is our C1000 zero degree cooling option. 

For the highest performance, we recommend our exclusive HC1000, which is specifically designed to handle testing for temperatures as low as -65 degrees C.  It provides the best planarity, lowest noise, and lowest cost of ownership, and all control options work with our probing specialized thermal chuck.

Our wide range of products allows you to configure your probe station to meet performance, budget and probing application requirements.  Please visit our website to learn more. 

Micromanipulator not only invented analytical probing in 1956 but we are the leading name in the field. We reliably deliver the tools and life cycle support the semiconductor industry depends on. Part of our company’s philosophy and what drives our success is an unfaltering commitment to our customers’ satisfaction. We offer the most comprehensive range of accessories available anywhere including our exclusive H1000 series thermal wafer chuck.         

Get the Technical Support You Need

Our success in the industry lies in the fact that we do not just design and manufacture the broadest range of probe stations and compatible accessories and consumable, but we also provide “Full Life-Cycle Support.”  With a global reach that now includes countries throughout Asia, Europe, the Middle East, and South American, we have sales reps and engineers stationed throughout our service areas to provide customers with sales and technical support.   On our website, you will find contact information and links to your area’s providers. 

Micromanipulator’s Full Life-Cycle Support starts at conception and continues with production, right through to maintaining your equipment to ensure you get optimal performance from your system.  This means our team is here to help you put together the best products for your testing application and see it is outfitted with the right accessories and consumables. 

Our experienced engineers are available to answer questions regarding our products and to provide on-going support.  Furthermore when you buy your tools from Micromanipulator, we help you protect your investment by offering extended warranties, preventative maintenance programs, and upgrade paths even for obsolete tools.

To get to know us better, please visit our website and discover the innovative technologies that go into each and every one of our products.   We are proud to offer probe stations that remove the “burden of performance” from system users, and allow them to focus on the data, not the prober.  Also you will find that we take a “systems approach” to integration with: vibration isolation, thermal management, and flexible, open architectures as well as materials selections.  And remember, if you cannot find what you are looking for talk to one of our engineers.   

At Micromanipulator, we not only invented analytical probing in 1956 but are still the top name in the field.  As such we reliably deliver the tools and life cycle support the semiconductor industry depends on.  A key part of our company’s philosophy and what drives our success is an unfaltering commitment to customers’ satisfaction.  Please contact us to find out more about our exceptional selection of probe stations and accessories.  

Proudly Manufactured in the USA

Headquartered in Carson City, Nevada, the Micromanipulator Company proudly designs, engineers, and manufactures our exceptional products right here in the USA.   With over 60 years in business and a reputation for being the first name in analytical probing, we have established a significant worldwide presence.   

We got our start by inventing analytical probing in 1956 and through the years have been responsible for pioneering many of the industry’s advancements including the integration of thermal chucks with probe stations.  Our excellent line of probe stations provide the most technologically advanced, non-operator dependent performance on the market.  Furthermore while we have worked hard to expand both our product line as well as our geographic footprint, the one thing that has not changed is our unwavering commitment to customer satisfaction.

It has also been a priority of ours to provide customers with the products that allow them to excel in their field.  This has led us to develop probe stations and tools that have a reputation for stability, open, flexible designs, and precise dependable mechanics.  With both our Micromanipulator probe stations and our new economical brand, Mechatronics ACE preconfigured probe stations; system users have more choices than ever to get products that fit their application needs, budget and personal preference. 

While we design, test and manufacture our probe stations at our U.S. facilities, we are able to bring that same level of expertise and resources to produce a broad range of compatible consumables and accessories.  Regardless of whether you chose a system level prober or one of our more economical models, you will find products that support your entire system from manipulators, probe holders and probe tips to thermal chucks, optics and more.  Please visit our website to see our entire line of products proudly produced in the USA and sold worldwide. 

Micromanipulator not only invented analytical probing in 1956 but we are leaders in the field and reliably deliver the tools and life cycle support the semi-conductor industry depends on. Our company’s philosophy and what drives our success is an unfaltering commitment to our customers’ satisfaction. For one of the most comprehensive selections of probe stations, consumables and accessories on the market, please visit our website.           

Check Out Our Excellent Buys in Used Probe Stations

It pays to periodically visit Micromanipulator’s website to not only keep up with our latest developments but to check out our newly replenished inventory of used probe stations and tools.  Micromanipulator’s used products offer customers an opportunity to buy the best at a significantly lower price and come with a one-year factory warranty.

Our used probe stations may be products that were used for demonstration purposes or are a result of customers taking advantage of our active upgrade and trade-in program.  In addition to ensure you get optimal performance from your tools, we have a worldwide network of service support engineers available to provide “system level” support on everything from thermal chucks to optics.

We recently increased our inventory of factory refurbished probe stations with the addition of three of Micromanipulator’s most popular models including a 350PM, 6200, and 8060.  The powerful, economical 350PM includes both coarse and fine platen Z-control for precise probe placement and is ideal for general probing applications. Offering outstanding flexibility, we also have interchangeable vacuum pedestal stage assemblies to facilitate probing up to 150mm (6”) wafers, up to 100 x 100mm (4”x 4”) hybrid substrates, and packaged delidded devices.  

The 6200 series is our most widely used probe station and is compatible with Micromanipulator’s extensive line of probes holders, tips and accessories.  Designed for ease of use as well as stability and precision, the 6200 model is very compact and economical.   These combined features make it an excellent foundation in which to build a complete probing system on.

The 8060 is the highest performance and value 200mm analytical probe station and offers users sub-micron positioning coupled with fA current resolution.  It is hot and cold chuck compatible (field upgradeable) and also has comprehensive accessory support.  It includes a microscope, thermal chuck plumbing & station.  Please see our website for all of the details on our refurbished models as well as new Micromanipulator and Mechatronics ACE preconfigured probe stations.

Micromanipulator not only invented analytical probing in 1956 but we are leaders in the field and reliably deliver the tools and life cycle support the semi-conductor industry depends on. Our company’s philosophy and what drives our success is an unfaltering commitment to our customers’ satisfaction. For one of the most comprehensive selections of probe stations, consumables and accessories on the market, please see our website.