Wafer Chucks Suited to Virtually Any Application or Budget

One of the things we do best at Micromanipulator is to listen to our customers and then design products to fit those needs.  One example is how we were the first ones in the industry to pioneer the integration of hot chuck systems with probe stations.  Continuing in that tradition, we are still the leading designers, engineers and manufacturers of wafer chucks that offer the broadest temperature range and the most advanced, non-operator dependent performance on the market today. 

 

Micromanipulator’s hot chuck systems support wafer testing from -65 to 400 degrees and offer features such as rapid heat up and cool down as well as minimizing expansion into the probes.  Our chucks maintain remarkable planarity over temperature changes with our Frictionless Kinematic Mount, and minimize heat radiation into the stage to prolong prober life.   Available in a choice of heating power supplies, we recommend an AC heating supply if you require fast heating without the need for chuck noise in the femtoamp level. To achieve the very lowest noise levels, go with our DC heating supply. 

 

Micromanipulator’s H1000 series thermal chucks are available in a range of configurations and provide the best planarity and the lowest noise to meet the needs of a variety of probing applications and budgets.  For users looking for the most economical cooling solution for above ambient testing conditions, our C1000 simple heat exchanger (HE) option is a great choice.  The chuck offers rapid cooling once the heat cycle is finished. 

 

Our C1000 zero degree cooling option offers the benefit of testing to zero degrees and provides optimal performance at holding temperatures at room ambient temperatures.  For applications requiring a wafer chuck to handle testing in temperatures as low as -65 degrees C, we offer our high-performance HC1000 cooling system.  All of Micromanipulator’s wafer chucks are capable of supporting 150 to 300 mm wafers in coaxial or triaxial configurations. 

 

At Micromanipulator, we not only invented analytical probing in 1956 but are still the top name in the field.  From concept, to production, right through to maintenance, our exclusive Full Life-Cycle Support guarantees customers’ success with our high-tech tools.   Please contact us to learn more about our wide range of probe stations and accessories.