Providing Support for C-V Measurements

With over decades of experience, Micromanipulator’s probe stations support a broad range of applications including Capacitance-Voltage (C-V) measurement.  Typically used to detect mobile ion contamination in oxide, and in particular very mobile sodium ion, the technique requires varying the voltage in order to measure the capacitance.

One of the challenges of C-V measurement is to design a device that not only passes manufacturers’ testing in a controlled environment but one that can also handle the migration of sodium ions within the device while in the field.  The failure to do so causes a multitude of problems such as changing the parameters of the electrical performance and affecting the timing, source and sink currents as well as the threshold voltages. 

At Micromanipulator, our expertise has allowed us to design and manufacture a probe station that addresses these problems.  Our semi-automatic 8860 model offers C-V users the ideal foundation to obtain quality test results.  The 8860’s stage provides ±1.5mm repeatability and accuracy with a resolution of 0.1mm, which allows thin lines and small pads to be probed. 

Another performance advantage we bring to C-V operators is our exclusive H1000 series thermal wafer chuck, a leader in the wafer probing industry that offers the best planarity, lowest noise, and lowest cost of ownership.  With the ability to support wafer testing from temperature ranges of –65 degrees C to 400 degrees C, the thermal chuck protects the station from the heat that is radiated down the body.  The 8860 is designed to completely contain the footprint of the chuck’s plumbing.  

To prevent fluid leakage, hoses that carry the cooling fluid are self-sealing disconnects. Furthermore, as it is light-weight, the 8860 allows for mobility of the unit.  Check with us for more details.     

At Micromanipulator, we not only invented analytical probing in 1956 but are still the top name in the field.  As such we reliably deliver the tools and life cycle support the semiconductor industry depends on.  A key part of our company’s philosophy and what drives our success is an unfaltering commitment to customers’ satisfaction.  Please contact us to learn more about our wide range of probe stations and accessories.