Micromanipulator’s exceptional
products include manufacturing the finest equipment for probing small
geometries. To ensure our products meet
not only our exacting standards but meet the various needs of our customers, we
commit time and energy into solving a range of applications problems. Many of these common problems are discussed
in our Application Notes as well as
our Probe Tips and Probe
Holder
Reference Manual.
For example our team spent hours
researching a solution for the common probing dilemma of maintaining probe
contact during temperature stressing of wafers,
which can compound the natural difficulties already associated with
probing. We know this is due to the
relative motion between the fixed probe connection to the manipulator and the desired
probe site on the wafer. The problem is
caused by the effects of the thermal expansion as materials are heated and/or the
converse contraction when they are cooled, which results in the relative motion.
Furthermore, as the motions occur in all
dimensional axes, system operators can encounter different perspectives on
different probing problems.
At Micromanipulator, we design and
manufacture an extensive range of high compliance probe points for probing
small geometries. One example is our
high compliance Model 7F probe point that follows a target device as it moves
in the X, Y, and Z axes. We suggest that
to improve your success, you probe as close to the vertical as you can get using
the very fine wire tip of the 7F. The flexible
probe concept is one of the safest ways to probe on very thin oxide sites regardless
of thermal cycling and certain thin oxides have shown no damage when vertically
probing with our Model 7F.
On our website,
you will find several tips for probing small geometries. We remind users that a little technique can
go a long way. By following our simple
guidelines, we feel sure you will have more success finding the most suitable
probing angle and/or technique. Please
visit Micromanipulator’s site to learn more.
Micromanipulator not only invented
analytical probing in 1956 but we remain the leading name in the field. As such we reliably deliver the tools and
life cycle support the semiconductor industry depends on. As part of our company’s philosophy and what
drives our success is an unfaltering commitment to customers’
satisfaction. We invite you to contact
us to find out more about our wide range of probe stations, accessories and
consumables.
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