A Solution for Uncontrolled Movement When Using a Hot Stage

When probing with a hot stage at extremely elevated temperatures or when doing CV measurement, it can result in movement of a device under the probe as well as the probe point.  While this is typically due to thermal expansion, the uncontrolled movement causes the probe to slide or jump off its contact.  In fact research shows that for every 100 degree ºC temperature change, the movement may account for as much as one mil at any given location.  On a six or eight-inch wafer, it may affect the testing results.     

One of the goals of Micromanipulator has been to not only listen to our customer but to provide assistance with common and sometimes not so common problems encountered during the wafer probing process.  To deal with the occurrence of uncontrolled movement using a hot stage, we discuss the causes and effects of this problem along with offering an equipment solution in one of our Application Notes on our website’s “Support” tab. 

Our products represent the finest equipment available for probing small geometries, and in addition, we spend considerable energy working to solve a variety of application problems.  Micromanipulator’s research proves that the dilemma of maintaining probe contact during temperature stressing of wafers is mainly due to the relative motion between the fixed probe connected to manipulator and desired probe site on the wafer. 

Our solution is to recommend Micromanipulator’s model 7F probe that is designed with a high temperature, bendable shank and tip and offers the largest radius for probe contact as well as the shortest conical taper length.  Together these features can minimize the skating or slipping effect of the probe tip on the wafer site.  Please see our website for more information. 

Micromanipulator not only invented analytical probing in 1956 but we are the leading name in the field and reliably deliver the tools and life cycle support the semi-conductor industry depends on. Our company’s philosophy and what drives our success is an unfaltering commitment to our customers’ satisfaction. You will find one of the most comprehensive ranges of probe stations on the market as well the consumables, accessories and on-site support you need.