The H1000 Series Chuck - Wafer Testing from -65 to 400 Degrees C*

At Micromanipulator we are proud to be at the forefront of providing customers with one of the best selections of waferchucks on the market.  In fact, our proprietary H1000 series thermal chuck leads the industry in offering the best planarity, lowest noise, and lowest cost of ownership.

While we know it is important to continue to design products for a broad range of specific applications, we also recognize that budget considerations are important to many of our customers.  This is why the exclusive H1000 series is available in a choice of configurations that addresses both application and budget needs.  The wafer chuck supports wafer testing from -65 to 400 degrees C and is an essential part of our comprehensive system integration for anyone of our high-quality probe stations. 

Some of the highlights of the H1000 series are your choice of either an AC heating power supply, which is best for applications that require fast heating without chuck noise in the femtoamp level.  If you need a chuck in the lowest noise level, we recommend going with the DC heating supply option.   

Also you can specify the cooling option that best fits your needs.  Micromanipulator’s C1000 simple heat exchanger (HE) is our most economical choice and is suitable for application requirements that only require high (above ambient) testing capabilities.  With this heat exchanger, users get a rapid cool down of the chuck to near room temperature once the heat cycle is complete.  If testing to zero degrees, you will want to get the C1000 zero degree option.  This heat exchanger offers users the best performance for holding temperatures around room ambient temperatures.   

Our third choice of heat exchangers is the high performance HC1000, which allows users to test at temperatures as low as -65* degrees C.  However, we do recommend the use of a prober integrated dry environment for low temperature applications in order to prevent condensation from impacting the measurement data, sample or prober stage.

Along with the rapid heat up and cool down features, the H1000 wafer chuck is also designed to minimize expansion into the probes.  In addition it maintains incredible planarity over temperature changes with our Frictionless Kinematic Mount, and at the same time, minimizes heat radiation into the stage to prolong prober life.  Please see our website or contact us for more information about our thermal wafer chucks.

At Micromanipulator, we not only invented analytical probing in 1956 but are still the top name in the field.  As such we reliably deliver the tools and life cycle support the semiconductor industry depends on.  A key part of our company’s philosophy and what drives our success is an unfaltering commitment to customers’ satisfaction.  Please contact us to learn more about our wide range of probe stations and accessories.