Micromanipulator’s Chucks Offer the Broadest Temperature Range

The Micromanipulator Company prides itself on manufacturing a wide range of high quality probe stations and smartly-designed accessories to meet the semiconductor industry’s every need. As the first company to integrate thermal chucks with probe stations, our wafer chucks are just one example of how we design premium products for comprehensive system integration as well as to address a variety of applications.

Micromanipulator’s thermal chucks offer the broadest temperature ranges and most advanced non-operator dependent performance in the industry. In addition to their rapid heat up and cool down feature, our innovative chucks also minimize expansion into the probes and heat radiation into the stage, which helps to prolong the prober’s life. 

Our hot chuck systems are designed for wafer testing from -65 to 400 degrees and support 150 to 300 mm wafers in coaxial or triaxial configurations. Micromanipulator’s Frictionless Kinematic Mount allows our thermal chucks to maintain a high degree of planarity over temperature changes. Furthermore we have several heating options. Our AC heating supply is recommended for applications that require fast heating without the need for chuck noise in the femtoamp level. To achieve the very lowest level measurements, we suggest you purchase your system with a DC heating supply. 

We also offer a choice of three cooling options depending on your application needs and budget. The most economical choice for high (above ambient) testing is the C1000 simple heat exchanger (HE), which provides rapid cool down of the chuck after a heat cycle is finished. The C1000 Zero Degree option is designed to test to zero degrees C. Micromanipulator’s third choice, the HC1000 high performance cooling system has the ability to test at temperatures as low as -65 degrees C.

In addition to our thermal chucks, we design, engineer and manufacture a wide assortment of other high-quality accessories and consumables as well as our entire line of probe stations. Please visit our website for more information regarding our innovative products. 

Micromanipulator not only invented analytical probing in 1956 but we remain the leading name in the field. As such we reliably deliver the tools and life cycle support the semiconductor industry depends on. As part of the company’s philosophy and what drives our success is an unfaltering commitment to customers’ satisfaction. Please contact us to find out more about our exceptional line of probe stations and accessories.