Hot Chuck Systems Support Wafers from 150 to 300 mm

As one of world’s foremost test probe manufacturers, the Micromanipulator Company’s thermal wafer chucks are designed to be part of our comprehensive system integration.  They are available for all Micromanipulator probe stations, including our Model 2210-LS Application Board Probe Station.  Chucks can be configured to meet specific probing application requirements and support 150 to 300 mm wafers in coaxial or triaxial configurations.   

With a range of features including rapid heat up and cool down, our thermal chucks support wafer testing from -65 to 400C.  In addition they offer choices in the heating power supply. The AC heating supply is perfect for fast heating when chuck noise in the femtoamp level is not needed.  Our DC heating supply allows system users to achieve the very lowest level of measurements.

We also offer our thermal chucks in a choice of three cooling options to meet application needs as well as budgets.  For the most economical choice, we recommend our C1000 Simple Heat Exchanger (HE) cooling that is ideal for high (above ambient) testing and has a rapid cool down of the chuck once the heat cycle has finished.   If your application requires a thermal chuck capable of testing to zero °C, you will need our C1000 Zero Degree option. For the highest performance cooling system, our HC1000 is capable of testing at temperatures as low as -65 °C.  

As with any of our probe stations or accessories, the Micromanipulator team welcomes questions regarding our thermal wafer chuck systems.  Once you buy our products, your investment will be protected by Micromanipulator’s warranties as well as our worldwide system level support.  All Micromanipulator brand products are guaranteed to be free of defects in materials and workmanship for a period of one year (extended warranties are available).  For our Mechatronics brands, we provide a 90-day warranty. Warranties excludes consumable items like probe tips. Our knowledgeable engineers are ready to answer your questions and concerns. 

At Micromanipulator, we not only invented analytical probing in 1956 but are still the top name in the field.  As such we reliably deliver the tools and life cycle support the semiconductor industry depends on. A key part of our company’s philosophy and what drives our success is an unfaltering commitment to customers’ satisfaction.  Please visit our website to learn more about products from one of the top test probe manufacturers in the world.