The Reliable P300L (300mm) Semi-automatic

For 60 years, Micromanipulator has been providing the semi-conductor industry with the finest quality probe stations as well as the consumables, accessories and on-site support they need. One example of our commitment to excellence is our semi-automatic P300L probe station.  Designed for semi-automatic applications on 300mm wafers, the high-performing P300L is a reliable, low-current-ready machine that makes it ideal for a broad range of testing applications.  Like the rest of our semi-automatics, the P300L is the most stable, intuitive and space efficient probe station on the market today.  

System users will also be pleased to discover the P300L comes with a variety of standard features including single-point ground and integrated thermal chuck plumbing.  The standard model additionally offers leadscrew – leadnut stage and platen drives as well as a stainless steel platen with a removable front wedge.  Equipped with a high, stable microscope bridge, it is designed to support all high resolution, long-working distance microscopes.  Moreover since the P300L is field upgradeable, users can choose from a selection of innovative thermal wafer chucks and other accessories that are designed for comprehensive system integration. 

The cost-effective semi-automatic offers users the option of configuring it with the local dry/shielded/dark environment “Top Hat” to facilitate low level or low temperature frost-free probing.  Another feature is our versatile controller, which supports USB, GPIB, and RS-232 communications (configured with proper options) and a fully motorized, programmable stage X-Y and Platen (Z).  If users desire they may also opt for a fully motorized, programmable control for the microscope.  However the station stage, microscope and platen can be easily operated by the joystick when a system is properly configured. 

We encourage you to take a look at our website for all of the information regarding our semi-automatic P300L as well as our other exceptional probe stations.  The professionals at Micromanipulator are ready to answer any questions you may have and to assist you in purchasing the best products for your needs. 

At Micromanipulator, we not only invented analytical probing in 1956 but are still the top name in the field.  From concept, to production, right through to maintenance, our exclusive Full Life-Cycle Support guarantees customers’ success with our high-tech tools.   Please contact us to learn more about our wide range of probe stations and accessories. 

Choose Micromanipulator for All of Your Probing Needs

Since our inception in 1956, Micromanipulator has not been content to rest on our laurels but rather continues to push the envelope by expertly designing products for the semi-conductor field that not only meets the most rigorous demands but routinely exceeds them.  As a pioneer in the field, we have made it our business to take a leading role in the rapidly evolving industry, which has experienced such incredible advances over our sixty years.

One of the developments that Micromanipulator brought to the field was a revolutionary integration of thermal chucks with probe stations.  To this day, we remain at the forefront of providing customers with the broadest available temperature range and the most advanced, non-operator dependent performance available anywhere.  As a customer, you benefit by having the opportunity to configure a thermal wafer chuck system that meets all of your performance, budget and probing application needs.

We also design, engineer and manufacture an excellent selection of probe holders including active probe holders, high frequency probe holders and probe tips for virtually any measurement equipment interface requirements.  You will find we have straight or bent model probe holders as well as our single unit holders like the Model 44.  This model comes with a fixed probe tip and is engineered for high frequency or low level signal testing. 

Finally keep in mind that all of Micromanipulator’s Specialty, Semi-automatic, High-performance, General-purpose Manual, and Economy Manual probe stations have been designed with the needs of our users in mind.  We have listened to our customers from the start, and our machines are designed to expertly address their needs.  Contact us to learn more about our exceptional products as well as our Full Life-cycle Support. 

Micromanipulator not only invented analytical probing in 1956 but we are leaders in the field and reliably deliver the tools and life cycle support the semi-conductor industry depends on. Our company’s philosophy and what drives our success is an unfaltering commitment to our customers’ satisfaction. For one of the most comprehensive selections of probe stations, consumables and accessories on the market please see our website.

Full Life-Cycle Support from the Leaders at Micromanipulator

We have close to 60 years of experience providing the high-tech tools that the semiconductor industry relies on.  Micromanipulator’s success lies in the fact that we do not just design and manufacture a comprehensive selection of manual, motorized, and semi-automatic probe stations, but we also provide “Full Life-Cycle Support.”

 

When you purchase a system from Micromanipulator, we work with you to make sure that you get the best probe station for your testing application as well as outfit it to get the optimal performance from your new tools.  Accessorize your station the way you need with microscopes, thermal chucks, vibration isolation, manipulators, light and noise shields, DC or RF measurement hardware.  This expert assistance which begins at conception continues right through to high-quality maintenance. 

 

In addition to our outstanding support, we are proud of the fact that our probe stations remove the “burden of performance” from system operators and allow users to focus on the data, not the prober.  Furthermore, we provide the industry technology that takes a “systems approach” to integration with: vibration isolation, thermal management and flexible, open architectures as well as materials selections.

 

Our global reach includes countries throughout Asia, the Middle East, Europe, and South America and the Where to Buy page on our website has contact information and links to all of our sales providers.  All of Micromanipulator’s global partners offer our Full Life-Cycle Support from concept to production, right through to maintenance.  Contact us to talk to one of our experienced engineers.

 

At Micromanipulator, we not only invented analytical probing in 1956 but are still the top name in the field.  From concept, to production, right through to maintenance, our exclusive Full Life-Cycle Support guarantees customers’ success with our high-tech tools.   Please contact us to learn more about our wide range of probe stations and accessories.

Learn More about Making Low Current Measurements

At Micromanipulator we not only sell state-of-the-art probe stations but have made it a priority to provide our customers with lots of useful information.  One of the areas we feel it is important to have more detailed information available for both beginners and experienced users is on making low current (femtoampere level) measurements with a probe station. 

 

In one of our application notes, we clearly go over the steps you need to consider for proper setup, shielding and guarding.  Our discussion includes many of the common problems users run into with low current probing and the best ways to solve them.  We also caution users to keep in mind that there are many factors that can adversely affect low level measurements.  By enumerating the most likely ones, system users will be better able to identify and minimize the noise source or the noise coupling mechanism and learn how to isolate noise from the signal.  

Furthermore, we discuss two typical probe contact configurations used in the grounding and shielding techniques for making low current measurements.  The first configuration is surface to surface, which is represented by MOSFET subthreshold measurements.  The second one we define is surface to substrate measurements that are represented by time dependent dielectric leakage observations (TDDL).  

We also go over the issue of cable isolation and noise.  Our team explains why femtoampere current measurements require very high resistive isolation and guarding between the signal path and all conductors at the reference potential.  In addition users will learn why it is important to keep their probe stations clean as well as the best models to use for low current probing - 8060, 8065 and the 8860.  We invite you to take a few minutes to read our complete application note on “Low Current Probing Basics.”

Micromanipulator not only invented analytical probing in 1956 but we remain the leading name in the field.  As such we reliably deliver the tools and life cycle support the semiconductor industry depends on.  We invite you to contact us to find out more about our wide range of probe stations, accessories and consumables.

Recommendations for Cleaning Probe Tips

At Micromanipulator, we are committed to offering our customers consumables and accessories that are as expertly designed, engineered and manufactured as our line of high-quality probe stations.  Moreover to satisfy our customers’ application needs and preferences, we have plenty of choices available.  One example is our extensive selection of probe holders and probe tips. 

 

We offer a line of disposable probe tips (needles) as well as probe holders and tips in a single unit such as our Model 44, which is ideal for high frequency, low level signal testing or cutting.  Our high conductance probe tips (HCT) are specifically manufactured to increase tip conductance and reduce the probe scrub needed by a factor of 5 or more. Our inventory also includes a variety of straight and bent style probe holders.

 

Micromanipulator provides instructions on cleaning probe tips for optimal performance.  For our tungsten, tungsten carbide, nickel tips, HCT tip and custom probe tips coated with platinum, we recommend removing deposit from the probe tip by rinsing it in deionized water and using compressed air to dry excess water from the tip.  To remove oxide deposits, dip the probe tip into a 1.0 solution of normal sodium hydroxide (NaOH) for a few seconds.  Follow by rinsing with deionized water and dry with compressed air.       

 

If you use our beryllium copper probe tips, we recommend removing deposits from the tip by rinsing in deionized water and using compressed air to dry.  To remove oxide deposits, we suggest washing the tip in a 10% w/w sodium carbonate solution (NA2CO3) and again rinse in deionized water; however, do not dry the tips!  Instead dip the tip into a 10% v/v nitric acid solution (HNO3) until a reaction occurs.  Do not allow the reaction to continue for more than a second and immediately rinse the tip in deionized water. Follow up by drying the excessive water with compressed air.  For more suggestions on cleaning your probe tips and probe holders, please see our website.

 

At Micromanipulator, we not only invented analytical probing in 1956 but are still the top name in the field.  From concept, to production, right through to maintenance, our exclusive Full Life-Cycle Support guarantees customers’ success with our high-tech tools.   Please contact us to learn more about our wide range of probe stations and accessories. 

A Used Probe Station Offers a Great Value

At Micromanipulator we offer the chance to purchase a used reliable high performance probe station for significant savings over the cost of a new one.  Many of these products are the ones we used to conduct demonstrations and come with the same factory warranties and full support as our new products. 

 

In addition since we offer an active product trade-in and upgrade program, you will find those tools for resale also.  Our third option to help you save money and still get the performance of a high-tech Micromanipulator tool is to purchase one of our refurnished units.  Again we stand behind all of these products, and they too come with our full support and performance guarantee. 

Tools currently available include:

• P300J
• P300A
• 4060
• 450PM

Check our website often for new listings.  If you do not see what you need, give us a call as there may be a chance we can find one for you. 

 

As a customer of a used Micromanipulator probe station, you will get the benefit of our worldwide network of service support engineers who provide “system level” support on everything from optics to thermal chucks.    

 

Our preventative maintenance programs, extended warranties, and upgrade paths (even for obsolete tools!) ensure your investment is protected.  By combining close to 60 years of analytical probing experience with state-of-the-art design, we have the capability to provide customers with the best probe stations, accessories and consumables on the market.

 

Micromanipulator not only invented analytical probing in 1956 but we remain the leading name in the field.  As such we reliably deliver the tools and life cycle support the semiconductor industry depends on.  As part of our company’s philosophy and what drives our success is an unfaltering commitment to customers’ satisfaction.  We invite you to contact us to find out more about our wide range of probe stations and accessories.

Wafer Chucks Suited to Virtually Any Application or Budget

One of the things we do best at Micromanipulator is to listen to our customers and then design products to fit those needs.  One example is how we were the first ones in the industry to pioneer the integration of hot chuck systems with probe stations.  Continuing in that tradition, we are still the leading designers, engineers and manufacturers of wafer chucks that offer the broadest temperature range and the most advanced, non-operator dependent performance on the market today. 

 

Micromanipulator’s hot chuck systems support wafer testing from -65 to 400 degrees and offer features such as rapid heat up and cool down as well as minimizing expansion into the probes.  Our chucks maintain remarkable planarity over temperature changes with our Frictionless Kinematic Mount, and minimize heat radiation into the stage to prolong prober life.   Available in a choice of heating power supplies, we recommend an AC heating supply if you require fast heating without the need for chuck noise in the femtoamp level. To achieve the very lowest noise levels, go with our DC heating supply. 

 

Micromanipulator’s H1000 series thermal chucks are available in a range of configurations and provide the best planarity and the lowest noise to meet the needs of a variety of probing applications and budgets.  For users looking for the most economical cooling solution for above ambient testing conditions, our C1000 simple heat exchanger (HE) option is a great choice.  The chuck offers rapid cooling once the heat cycle is finished. 

 

Our C1000 zero degree cooling option offers the benefit of testing to zero degrees and provides optimal performance at holding temperatures at room ambient temperatures.  For applications requiring a wafer chuck to handle testing in temperatures as low as -65 degrees C, we offer our high-performance HC1000 cooling system.  All of Micromanipulator’s wafer chucks are capable of supporting 150 to 300 mm wafers in coaxial or triaxial configurations. 

 

At Micromanipulator, we not only invented analytical probing in 1956 but are still the top name in the field.  From concept, to production, right through to maintenance, our exclusive Full Life-Cycle Support guarantees customers’ success with our high-tech tools.   Please contact us to learn more about our wide range of probe stations and accessories.