Common Setup & Equipment Problems in Low Current Probing

The Micromanipulator Company offers solutions and tips to common problems encountered by system users as a way to help them use their tools most effectively. In our Application Note called, “Identifying Low Current Probing Problems,” we explain common equipment and setup problems encountered in low current probing applications that show up as characteristic distortions and problem “signatures” with the data. (We also offer more tips and info in our “Basics of Low Current Probing” Application Note)

We want customers to know that by using the right tools and proper setup, analytical probing at very low (femtoamp) current levels can reliably be achieved without anxiety. Many of the problems users encounter stem from the fact that there has been very little information available up to now on how to properly evaluate equipment as well as tips on how to setup the probing application. This has led to a misunderstanding of the effect this has on low current probing and confusion in how to troubleshooting the problem. 

One common application probe stations are used for is Capacitance versus Voltage measurements (CV measurements) of MOS devices. This is a prime example of how using the proper setup and techniques, Micromanipulator’s equipment gives users a broad frequency range and cleanliness of C-V measurements. Our Application Note guides you through a range of General Setup Considerations and Two-Point Wafer Surface Measurement. You will also find a discussion of C-V Measurements through the Prober Chuck. 

We encourage you to visit our website to read through the entire Application Note for great suggestions and tips. Furthermore while you are there, visit our online store to conveniently buy our probe holders, probe tips, probe positioners/manipulators, patch cords and our new Mechatronics Ace probe stations. Questions? Please give us a call or email us. 

Micromanipulator not only invented analytical probing in 1956 but we reliably deliver the tools and life cycle support the semiconductor industry depends on. Part of our company’s philosophy and what drives our success is an unfaltering commitment to customer satisfaction. Along with offering one of the best selections of probe stations on the market today, we also have all of the consumables, accessories and on-site support you need.

Micromanipulator’s Chucks Offer the Broadest Temperature Range

The Micromanipulator Company prides itself on manufacturing a wide range of high quality probe stations and smartly-designed accessories to meet the semiconductor industry’s every need. As the first company to integrate thermal chucks with probe stations, our wafer chucks are just one example of how we design premium products for comprehensive system integration as well as to address a variety of applications.

Micromanipulator’s thermal chucks offer the broadest temperature ranges and most advanced non-operator dependent performance in the industry. In addition to their rapid heat up and cool down feature, our innovative chucks also minimize expansion into the probes and heat radiation into the stage, which helps to prolong the prober’s life. 

Our hot chuck systems are designed for wafer testing from -65 to 400 degrees and support 150 to 300 mm wafers in coaxial or triaxial configurations. Micromanipulator’s Frictionless Kinematic Mount allows our thermal chucks to maintain a high degree of planarity over temperature changes. Furthermore we have several heating options. Our AC heating supply is recommended for applications that require fast heating without the need for chuck noise in the femtoamp level. To achieve the very lowest level measurements, we suggest you purchase your system with a DC heating supply. 

We also offer a choice of three cooling options depending on your application needs and budget. The most economical choice for high (above ambient) testing is the C1000 simple heat exchanger (HE), which provides rapid cool down of the chuck after a heat cycle is finished. The C1000 Zero Degree option is designed to test to zero degrees C. Micromanipulator’s third choice, the HC1000 high performance cooling system has the ability to test at temperatures as low as -65 degrees C.

In addition to our thermal chucks, we design, engineer and manufacture a wide assortment of other high-quality accessories and consumables as well as our entire line of probe stations. Please visit our website for more information regarding our innovative products. 

Micromanipulator not only invented analytical probing in 1956 but we remain the leading name in the field. As such we reliably deliver the tools and life cycle support the semiconductor industry depends on. As part of the company’s philosophy and what drives our success is an unfaltering commitment to customers’ satisfaction. Please contact us to find out more about our exceptional line of probe stations and accessories.

Professional Full Life-Cycle Support & Upgrade Paths

The Micromanipulator Company has always taken a different approach from that of our competitors. To start with, we are committed to customer satisfaction and have always encouraged feedback from our customers. This has allowed us to design products that better serve our customers’ needs, and today we proudly manufacture one of the most extensive lines of probe stations and accessories on the market. In addition we offer an online store as well as a demonstration hub that allows customers to use our products in a real-world setting. 

As the leading manufacturer of system level analytical probing tools, our products are used for device modeling and characterization, design verification, design and market FA, process verification, quality control, and more. Our wide range of probe stations means we are able to provide products to meet application needs along with personal preferences and budgets. Micromanipulator also offers a large inventory of high-quality accessories and consumables to meet your measurement equipment interface requirements and budget.

Furthermore we recognize that buying the right products is an investment and that our customers need reliable tools that allow them to succeed in their pursuit of developing products for the future. This is why we offer upgrade paths even for obsolete tools along with extended warranties and preventive maintenance programs to protection your investment. And as we have a worldwide presence, we can provide full support wherever you are located.

Please contact us to learn more about one of the most trusted global test probe manufacturers in the industry. Our areas of expertise include: Low current / low noise measurement; Failure Analysis; High and low temperature characterization; Device reliability analysis – Interconnect, EM, HCI, Charge Pumping, NBTI, PBTI, TDDB; High speed digital analysis; and High frequency up to 200GHz. We also specialize in C-V measurements, Sub-micron probing, ESD wafer level testing, and Laser cutting. For more information visit our website or give us a call. Our engineers are ready to help. 

Micromanipulator not only invented analytical probing in 1956 but we remain the leading name in the field. As such we reliably deliver the tools and life cycle support the semiconductor industry depends on. As part of the company’s philosophy and what drives our success is an unfaltering commitment to customers’ satisfaction. Please contact us to find out more about our exceptional line of probe stations and accessories.

The Mechatronics ACE Manual Probe Station - Built to Your Needs

Micromanipulator’s newest brand, our Mechatronics probe stations, are ideal for a wide variety of applications. Mechatronics probers are designed by the same team of talented engineers who design our state-of-the-art Micromanipulator line, and are perfect for budget-conscious system users looking for stable, reliable performance. In addition the Mechatronics Ace can be ordered from our online store and is available with a choice of high quality accessories and consumables. 

One of the accessory choices for the Mechatronics includes two microscope options – our Binocular microscope (ACE-SCP-BINO) and the Trinocular microscope (ACE-SCP-TRI). Both of the microscopes provide a wide field of view and long working distances as well as offer a StereoZoom on a super flexible boom stand for more than 6″x 6″ (150x 150mm) X-Y positioning. Please note that the Binocular microscope does not support camera mounting while the Trinocular microscope does. 

Our Mechatronics probe stations also have a choice of either a magnetic or vacuum manipulator (formerly the Micromanipulator 110/210). Available in either a left hand or right hand version, the XYZ controls face forward when placed on right side of probing setup. An optional MINI-VAC vacuum pump is designed for our Mechatronics accessories and/or an ACE-VAC-PUC collection plate.

When you order a Mechatronics Ace, you will have the opportunity to select a Single Wire (Pair) (ACE-PRB-HLDR-S) or Coaxial (Pair) (ACE-PRB-HLDR-C) probe holder, or to just skip that step altogether. At the same time, you can also order Mechatronics ACE Probe Tips (ACE-PRB-TIP-B) in the amount you need. 

Please visit our website to learn more about our high-quality probe stations and all of our excellent choices in accessories and consumables. Our engineers are ready to answer any questions you may have and can be contacted via phone or email. 

Micromanipulator not only invented analytical probing in 1956 but we are leaders in the field and reliably deliver the tools and life cycle support the semi-conductor industry depends on. Our company’s philosophy and what drives our success is an unfaltering commitment to our customers’ satisfaction. For one of the most comprehensive selections of probe stations, consumables and accessories on the market, please see our website.

Best Probe Stations on the Market for Probing 3mm Wafers

If you are looking for a high-quality probe station for probing 3mm wafers, we encourage you to take a looks at the Micromanipulator Company’s website. Our selection includes three smartly-designed probers, the P300A and P300L Semi-automatic Probe Stations and the P300J Motorized Manual Probe Station. 

If you are looking for the best value in a semi-automatic 3mm probe station, we recommend taking a look at the P300L. This station offers customers a great deal, in addition to the fact that the automation can be incrementally upgraded as needed. It is low current ready and is built with your application and budget in mind. Equipped with a coaxial chuck, it is thermal and triaxial chuck upgradable. The P300L is designed for a wide range of testing applications and offers reliability as well as precision.

If your application requires a high-performance probe station, the P300A Semi-automatic provides users with the highest performance. Designed for low current and sub-micron applications, the P300A is the most stable, intuitive, and space efficient 3mm probe station on the market. It comes with a comprehensive software suite, a standard coaxial chuck (thermal & triaxial chuck upgradeable) and features such as single-point ground and dry/dark environment.

Our P300J Motorized Manual Probe Station not only offers the highest performance but is the most stable, intuitive, and space efficient manual 300mm analytical probe station on the market. Designed for low current, sub-micron positioning applications, it features a fA current resolution; sub-micron motorized positioning, and a standard coaxial chuck (thermal & triaxial chuck upgradable). 

The Micromanipulator website provides much more information regarding our selection of 3mm probe stations including our 2210-LS Application Board Probe Station designed for <200mm, 200mm, 300mm probing. You will also find details and specifications on our entire line of probe stations and accessories. If you have any questions, please give us a call or email us. 

Micromanipulator not only invented analytical probing in 1956 but we remain the leading name in the field. As such we reliably deliver the tools and life cycle support the semiconductor industry depends on. As part of our company’s philosophy and what drives our success is an unfaltering commitment to customers’ satisfaction. We invite you to contact us to find out more about our wide range of probe stations, accessories and consumables.

Tips for Dealing with Uncontrolled Movement When Probing

At the Micromanipulator Company, we have always based our success on that of our customers. By listening (and learning) to our customers, we have been able to explore and develop solutions to a range of common and sometimes not so common problems encountered during the wafer probing process. 

One such problem is uncontrolled movement that causes the probe to slide or jump off its contact when using a hot stage at extremely elevated temperatures or for CV measurement. (You will find detailed information on this topic in one of Application Notes under our website’s “About” tab.) While likely due to thermal expansion, research has found that for every 100 ºC temperature change, the movement may account for as much as one mil at any given location. On a six or eight-inch wafer, this type of movement may affect your testing results. 

As a way to solve these problems, we offer equipment solutions such as our high compliance 7F probe point. The 7F’s very fine wire tip flexes and is designed to follow a target device as it moves in the X, Y, Z axes. The high temperature, bendable shank and tip offers the largest radius for probe contact as well as the shortest conical taper length to minimize the skating or slipping effect of the probe tip on the wafer site. Using it with a small amount of flexure on the tip and at the near vertical angle of about 80o ± 5o, it is steep enough for the application and still visible under the microscope. 

Micromanipulator works hard to find solutions to application problems and is proud to bring customers the finest equipment on the market for probing small geometries. For your convenience, the 7F Tungsten Cat Whisker Probe Tip is available at our online store. Please visit our website to see our full line of probe tips and probe holders as well as our probe stations and accessories. 

Micromanipulator not only invented analytical probing in 1956 but we are the leading name in the field and reliably deliver the tools and life cycle support the semiconductor industry depends on. Our company’s philosophy and what drives our success is an unfaltering commitment to our customers’ satisfaction. You will find one of the most comprehensive ranges of probe stations on the market as well the consumables, accessories and on-site support you need.

The World’s Most Trusted Manufacturer of Analytical Probing Tools

At the Micromanipulator Company, we understand that our customers need reliable, high-performing tools to develop the innovative products of the future. This is why we proudly produce the market’s best high performance, efficient analytical probe stations and accessories for both wafer level and decapsulated packaged part probing. 

While Micromanipulator has been around for more than 60 years, we say that our “history positions us well to continue to be an asset to our customers.” And as to our future – it will see us continuing to address tomorrow’s semiconductor testing needs. As we grow with the industry, we listen and learn from our customers, and our talented R&D team works hard to develop products that meet those needs. No doubt this is why our products have earned a reputation for their quality and precision and are used by the top test labs around the world. 

In addition to updating, improving and developing new products, our goal is to help you find the best probe station for your application. Our extensive website is a good place to start as it is loaded with useful technical specifications regarding performance and our Micromanipulator’s team is also ready to help answer questions. If you are interested in evaluating the performance and capabilities of Micromanipulator’s tools in a real world setting, we encourage you to schedule a visit to our California demonstration facility. 

Our online Request Quotation form is another way to begin the process of finding the best tools for your application. By answering a couple of basic questions including the product category you would like to get a quotation for such as: a wafer probe station, application board probe station, accessories, thermal chuck or product service/support, helps us to serve you better. We also ask about your area of interest: is it failure analysis, wafer level reliability, device characterization, process modeling or process monitoring (i.e. CV)? Additionally are you currently using probing equipment? 

As we design, engineer and manufacture an extensive line of accessories and consumables, you can outfit your probe station to meet your application needs as well as your budget and personal preferences. Contact us to learn more. 

Micromanipulator not only invented analytical probing in 1956 but we remain the leading name in the field. As such we reliably deliver the tools and life cycle support the semiconductor industry depends on. As part of the company’s philosophy and what drives our success is an unfaltering commitment to customers’ satisfaction. Please contact us to find out more about our exceptional line of probe stations and accessories.