H1000 Series Thermal Wafer Chuck

At Micromanipulator we are pleased to offer our customers smartly-designed, high-tech accessories.  One such product is our exclusive H1000 series thermal wafer chuck, which provides system users with the best planarity and lowest noise.  We are also proud of the fact that it offers the lowest cost of ownership on the market.  The H1000 supports wafer testing from -65 to 400 degrees C, and is available in several configurations to meet your application requirements as well as budget.

Options for the thermal chuck include a choice of two power supplies.  The AC heating power supply is designed for fast heating and for applications that do not require chuck noise in the femtoamp level.  Our DC heating supply is the appropriate choice when you need to achieve the very lowest noise levels. 

Our C1000 simple heat exchange (HE) option also offers customers the most economical cooling for above ambient testing.  Once the heat cycle is finished, the wafer chuck rapidly cools down.  For testing to zero degrees**, choose the zero degree option of the C1000.  This gives users the best performance in holding temperatures at room ambient temperatures. 

Our thermal wafer chucks are designed to work with all control options.  Other highlights include: rapidly heating up and cooling down; minimizing expansion into the probes; maintaining incredible planarity over temperature changes with our Frictionless Kinematic Mount; and minimizing heat radiation into the stage to prolong prober life.   Our hot chucks support 150 to 300 mm wafers in coaxial or triaxial configurations. 

Please see our website or contact one of our engineers to learn more about our line of probe stations and high-quality accessories.  We are constantly reviewing and improving our products and are always happy to hear feedback from our customers in order to continue to design products that meet their needs. 

Micromanipulator not only invented analytical probing in 1956 but we remain the leading name in the field. From concept, to production, right through to maintenance, our exclusive Full Life-Cycle Support guarantees customers’ success with our high-tech tools.  Please contact us to find out more about our wide range of probe stations, accessories and consumables.        

Helpful Guidelines for Successful Low Level Measurements

Micromanipulator wants our customers to succeed, which is why we design high-quality products for a wide range of applications.  We also understand it is important to provide information on each product and to be available to answer our customers’ questions.  For technical details and troubleshooting, we offer a variety of pdfs and Application Notes.   

One of our Application Notes deals with “The Basics of Low Current Probing.”  Included in the comprehensive discussion are common problems users run into with low current probing, and suggestions for how to solve them.  The document summarizes a list of helpful guidelines for successful low level measurements. 

We start by reminding users to pay attention to details as the nature of the very small physical values being observed mean there are a variety of factors that can interfere with the desired measurements.  Micromanipulator’s experts recommend getting into the habit of reviewing and practicing preventive measures to eliminate problems before they occur. 

We also offer a tip on how to diagnose noise sources and to minimize their effects.  Since analog time domain measurement techniques are not readily available for direct observation at femtoampere levels, this can be challenging.  One of our suggestions is to use a parametric tester that is configured to provide a sampled sweep of current versus time with a constant source voltage. 

Another area we discuss is system grounds, shields and connections.  We provide a couple diagrams that show the ideal grounding, shielding and connection scheme for surface to surface and surface to substrate current measurements. 

You will also find information regarding exploit filtering and averaging available in the instrument.  We suggest parametric measurements such as subthreshold and TDDL that lend themselves to filtering and averaging.  In addition our guidelines handle topics such as guarding and settling time, cable isolation and noise, and cleanliness.  See our website to read the full report and to see our full line of high-quality probe stations and accessories. 

Micromanipulator not only invented analytical probing in 1956 but we are leaders in the field and reliably deliver the tools and life cycle support the semi-conductor industry depends on. Our company’s philosophy and what drives our success is an unfaltering commitment to our customers’ satisfaction. Please contact us to learn more about our wide range of probe stations and accessories. 

We Offer an Active Product Upgrade and Trade-in Program

Along with our commitment to produce probe stations that meet our customers’ application and budget needs, we also offer an opportunity to upgrade your present machine with one of our newer models.  We recognize that needs change which is why we support an active product upgrade and trade-in program.  In addition our upgrade paths are even available for obsolete tools so it is much easier than you may have thought to take advantage of some of the newer advancements in the field and get the features you need. 

Furthermore, for those on a limited budget these trade-ins along with demonstration products are offered for sale at a significate discount.  All of these tools come with a factory warranty and support just as our new products do. Please check our website for the current offering of used tools and if you don’t see the model you want, contact us.  We might have what you are looking for! 

Micromanipulator is the leading manufacturer of probe stations and with 16 different models to choose from and new products currently under development, you are certain to find a system perfect for your requirements.  In fact we are proud to offer our customers the most comprehensive selection of high-quality probe stations and accessories available on the market today. 

Our selection includes Manual, Motorized, or Semiautomatic models that offer a variety of different price points to match both budget and application needs.  We develop and produce an extensive list of consumables and accessories so you can determine how best to outfit your station. Your choice includes Micromanipulator’s high-quality thermal chucks, microscopes, vibration isolation, light and noise shields, manipulators, DC and RF measurement hardware. 

Micromanipulator not only invented analytical probing in 1956 but we remain the leading name in the field. From concept, to production, right through to maintenance, our exclusive Full Life-Cycle Support guarantees customers’ success with our high-tech tools.  Please contact us to find out more about our wide range of probe stations, accessories and consumables.        

Our Probe Stations Offer Optimal Performance

Regardless of what your probing requirements are, Micromanipulator has a high-quality probe station that will suit your needs.  We proudly offer one of the largest selections on the market along with a wide assortment of consumables, accessories and on-site support. 

We make it easy to shop for one of our Specialty, Semi-automatic, High-performance, General-purpose Manual, and Economy Manual probe stations by providing comprehensive specifications and details on each model.  This enables you to find a probe station that meets your technical needs as well as your price range and personal preferences.  You will discover models such as our 2210 LS, the world’s first true system level probe station with above and below ambient temperature capabilities to our reliable Economy 450PM Manual station.   Furthermore, you can feel confident buying any of our products as they all come with factory warranties and support.    

Our website also offers a printable brochure highlighting the various features and benefits of the probe stations.  We include practical information such as the test station dimensions and X-Y stage movement along with the full range of accessories and options available including: probe card holders, light tight enclosures, thermal chucks, video accessories, manual / motorized manipulators. 

System users will find our extensive selection of probe stations are designed for applications such as: high frequency up to 200GHz; C-V measurements; sub-micron probing; ESD wafer level testing; laser cutting; and high power device analysis.  In addition our areas of expertise include: low current / low noise measurement; failure analysis; high and low temperature characterization; device reliability analysis - Interconnect, EM, HCI, Charge Pumping, NBTI, PBTI, TDDB; and high speed digital analysis. 

We are an American-based company with state-of-the-art design, test, and manufacturing capabilities, and produce our entire line of probe stations and accessories at our Carson City, Nevada headquarters.  Please visit our website or give our engineers a call for more information.  

Micromanipulator not only invented analytical probing in 1956 but we are leaders in the field and reliably deliver the tools and life cycle support the semi-conductor industry depends on. Our company’s philosophy and what drives our success is an unfaltering commitment to our customers’ satisfaction. For one of the most comprehensive selections of probe stations, consumables and accessories on the market, please visit our website.           

Probe Holders Designed for a Variety of Applications

One of the reasons we design and manufacture so many different probe holders is our customers tell us what they need, and we produce the products to fulfill those needs.  You will find our lineup of probe holders is one of the most comprehensive on the market.  Our holders address a broad range of application requirements including: general purpose DC characterization, high speed, wide bandwidth, low current and high power.  Also by producing such a variety of products, our users have the opportunity to choose a holder based on their measurement equipment interface requirements or application demand as well as budget and personal preference. 

The Model 44, one of our single unit holders, offers so many options and configurations it is virtually a custom probe.  Features include a frequency range from DC to 3 GHz; low level signal testing; 50-ohm circuit testing; CV testing; and Kelvin force, and sense and single wire configurations.  This economical probe is appropriate for the most common microwave test and has coaxial shielding that extends from the cable connection through the body of gold plated brass to the tungsten probe point.

Micromanipulator’s high attack angle probe holders, models 75-80, are designed for hot stage probing and are ideal for applications where probing is difficult due to thermal expansion or vibration. While the holders accept any Model 7 point, they are specifically designed to be used with high compliance points such as models 7F, 7F-10, 7F-C10, and 7S.  Please keep in mind that because these probe holders have a high angle of attack, the probe point must be approximately 3/8” below the holder in order to be visible.  This means any compound microscope objectives with a working distance of less than 1/2 inch (12.5 mm) may not be feasible.   

Our probe holders are also available in a variety of versions including coaxial or triaxial, high frequency, active, high/low temperature, high power and low profile.  Please see our Probe Tip and Probe Holder Reference Manual to learn more details and specifications about our full line of exceptions probe tips and holders.

As early pioneers in the analytical probing field, we bring 60 years of experience to give customers state-of-the-art products that are expertly designed, engineered, manufactured and meticulously tested. In addition, our commitment to customers’ satisfaction includes “Full Life-Cycle Support” that starts from concept, to production, right through to maintenance.  Contact us to learn more about our exceptional line of probe stations and accessories.

An Impressive Selection of Semi-automatic Probe Stations

At Micromanipulator we are proud to offer our customers a selection of semi-automatic probe stations designed for a broad range of applications.  Our semi-automatic models include the P200L (200mm), P200A (200mm), P300L (300mm), and P300A (300mm). 

Standard features on our reliable, precision-engineered P200L include single-point ground and integrated thermal chuck plumbing and features leadscrew-leadnut stage and platen drives and a stainless steel platen with removable front wedge.   The P200L is designed for semiautomatic applications on 200mm wafers and offers a high stability microscope bridge to support high resolution, long-working distance microscopes.  Along with a low acquisition cost and ease of use, the economical probe station allows for joystick operation of the station stage, platen, and microscope.

Our P200A model provides system users with the highest performance 200mm semiautomatic probe station on the market.  Standard features include a comprehensive software suite (our revolutionary netProbeTM), and the best low current, sub-micron and temperature probing performance.  In addition to offering comprehensive accessory support for the P200A, it is field upgradeable with hot and cold thermal chucks.

The P300L is the probe station of choice if you are looking for high performance, full capability and cost-effectiveness.  It is intended for semiautomatic applications on 300mm wafers and is low current ready.  The reliable P300L may be configured with a local dry / shielded / dark environment “Top Hat” for low level or low temperature, frost free probing.   In addition it has comprehensive accessory support and is field upgradable with hot and cold thermal chucks. 

Our model P300A is the highest performance 300mm semiautomatic probe station on the market.  It comes with a comprehensive software suite and offers the best low current, sub-micron, and temperature probing performance.  Along with being the most stable, intuitive, and space efficient 300mm semi-automatic analytical probe station on the market, the P300A features a single-point ground, dry/dark environment and integrated thermal chuck plumbing.  We offer a comprehensive line of accessories compatible with the field upgradeable probe station.  See our website for all of the specifications and features of our semiautomatics as well as the rest of our line of exceptional probe stations.

Micromanipulator not only invented analytical probing in 1956 but we are leaders in the field and reliably deliver the tools and life cycle support the semi-conductor industry depends on. Our company’s philosophy and what drives our success is an unfaltering commitment to our customers’ satisfaction. For one of the most comprehensive selections of probe stations, consumables and accessories on the market, please see our website.           

Sixty Years and Going Strong

Right from the beginning, Micromanipulator took a leading role in the semiconductor industry with cutting edge technologies and innovations. It was in 1956 when we first invented analytical probing, and since then we have increased our reach to include countries throughout Asia, Europe, the Middle East and South America.  Never content to rest on our past successes, we continually use our vast experience to improve upon our current line of products and develop new ones.   

By combining sixty years of analytical probing experience with state-of-the-art design, we have the capability to provide customers with the best products on the market. With 16 different models, Micromanipulator offers the most comprehensive selection of probe stations available.  In addition, our exceptional line-up of consumables and accessories are expertly designed, tested and manufactured to meet application requirements, budget demands and personal preferences.  We have a wide range of thermal chucks, probe holders and tips, manipulators, unique probe holders, vibration isolation tables, camera systems and more.

At Micromanipulator, we have always measured our success by that of our customers.  Our unique approach to customer satisfaction includes our “Full Life-Cycle Support” that starts from concept, to production, right through to maintenance.  Our worldwide network of service support engineers support the entire system from optics to thermal chucks.  To ensure your investment is protected, we offer extended warranties, preventative maintenance programs, and upgrade paths for current or obsolete tools.

For information regarding our probe stations as well as our other high-quality accessories, please see our website or contact one of our engineers. 

Micromanipulator not only invented analytical probing but we are the leading name in the field. We reliably deliver the tools and life cycle support the semiconductor industry depends on. Part of our company’s philosophy and what drives our success is an unfaltering commitment to our customers’ satisfaction. Please contact us to find out more about our exceptional line of products.