Common Setup & Equipment Problems in Low Current Probing

The Micromanipulator Company offers solutions and tips to common problems encountered by system users as a way to help them use their tools most effectively. In our Application Note called, “Identifying Low Current Probing Problems,” we explain common equipment and setup problems encountered in low current probing applications that show up as characteristic distortions and problem “signatures” with the data. (We also offer more tips and info in our “Basics of Low Current Probing” Application Note)

We want customers to know that by using the right tools and proper setup, analytical probing at very low (femtoamp) current levels can reliably be achieved without anxiety. Many of the problems users encounter stem from the fact that there has been very little information available up to now on how to properly evaluate equipment as well as tips on how to setup the probing application. This has led to a misunderstanding of the effect this has on low current probing and confusion in how to troubleshooting the problem. 

One common application probe stations are used for is Capacitance versus Voltage measurements (CV measurements) of MOS devices. This is a prime example of how using the proper setup and techniques, Micromanipulator’s equipment gives users a broad frequency range and cleanliness of C-V measurements. Our Application Note guides you through a range of General Setup Considerations and Two-Point Wafer Surface Measurement. You will also find a discussion of C-V Measurements through the Prober Chuck. 

We encourage you to visit our website to read through the entire Application Note for great suggestions and tips. Furthermore while you are there, visit our online store to conveniently buy our probe holders, probe tips, probe positioners/manipulators, patch cords and our new Mechatronics Ace probe stations. Questions? Please give us a call or email us. 

Micromanipulator not only invented analytical probing in 1956 but we reliably deliver the tools and life cycle support the semiconductor industry depends on. Part of our company’s philosophy and what drives our success is an unfaltering commitment to customer satisfaction. Along with offering one of the best selections of probe stations on the market today, we also have all of the consumables, accessories and on-site support you need.

Micromanipulator’s Chucks Offer the Broadest Temperature Range

The Micromanipulator Company prides itself on manufacturing a wide range of high quality probe stations and smartly-designed accessories to meet the semiconductor industry’s every need. As the first company to integrate thermal chucks with probe stations, our wafer chucks are just one example of how we design premium products for comprehensive system integration as well as to address a variety of applications.

Micromanipulator’s thermal chucks offer the broadest temperature ranges and most advanced non-operator dependent performance in the industry. In addition to their rapid heat up and cool down feature, our innovative chucks also minimize expansion into the probes and heat radiation into the stage, which helps to prolong the prober’s life. 

Our hot chuck systems are designed for wafer testing from -65 to 400 degrees and support 150 to 300 mm wafers in coaxial or triaxial configurations. Micromanipulator’s Frictionless Kinematic Mount allows our thermal chucks to maintain a high degree of planarity over temperature changes. Furthermore we have several heating options. Our AC heating supply is recommended for applications that require fast heating without the need for chuck noise in the femtoamp level. To achieve the very lowest level measurements, we suggest you purchase your system with a DC heating supply. 

We also offer a choice of three cooling options depending on your application needs and budget. The most economical choice for high (above ambient) testing is the C1000 simple heat exchanger (HE), which provides rapid cool down of the chuck after a heat cycle is finished. The C1000 Zero Degree option is designed to test to zero degrees C. Micromanipulator’s third choice, the HC1000 high performance cooling system has the ability to test at temperatures as low as -65 degrees C.

In addition to our thermal chucks, we design, engineer and manufacture a wide assortment of other high-quality accessories and consumables as well as our entire line of probe stations. Please visit our website for more information regarding our innovative products. 

Micromanipulator not only invented analytical probing in 1956 but we remain the leading name in the field. As such we reliably deliver the tools and life cycle support the semiconductor industry depends on. As part of the company’s philosophy and what drives our success is an unfaltering commitment to customers’ satisfaction. Please contact us to find out more about our exceptional line of probe stations and accessories.

Professional Full Life-Cycle Support & Upgrade Paths

The Micromanipulator Company has always taken a different approach from that of our competitors. To start with, we are committed to customer satisfaction and have always encouraged feedback from our customers. This has allowed us to design products that better serve our customers’ needs, and today we proudly manufacture one of the most extensive lines of probe stations and accessories on the market. In addition we offer an online store as well as a demonstration hub that allows customers to use our products in a real-world setting. 

As the leading manufacturer of system level analytical probing tools, our products are used for device modeling and characterization, design verification, design and market FA, process verification, quality control, and more. Our wide range of probe stations means we are able to provide products to meet application needs along with personal preferences and budgets. Micromanipulator also offers a large inventory of high-quality accessories and consumables to meet your measurement equipment interface requirements and budget.

Furthermore we recognize that buying the right products is an investment and that our customers need reliable tools that allow them to succeed in their pursuit of developing products for the future. This is why we offer upgrade paths even for obsolete tools along with extended warranties and preventive maintenance programs to protection your investment. And as we have a worldwide presence, we can provide full support wherever you are located.

Please contact us to learn more about one of the most trusted global test probe manufacturers in the industry. Our areas of expertise include: Low current / low noise measurement; Failure Analysis; High and low temperature characterization; Device reliability analysis – Interconnect, EM, HCI, Charge Pumping, NBTI, PBTI, TDDB; High speed digital analysis; and High frequency up to 200GHz. We also specialize in C-V measurements, Sub-micron probing, ESD wafer level testing, and Laser cutting. For more information visit our website or give us a call. Our engineers are ready to help. 

Micromanipulator not only invented analytical probing in 1956 but we remain the leading name in the field. As such we reliably deliver the tools and life cycle support the semiconductor industry depends on. As part of the company’s philosophy and what drives our success is an unfaltering commitment to customers’ satisfaction. Please contact us to find out more about our exceptional line of probe stations and accessories.

The Mechatronics ACE Manual Probe Station - Built to Your Needs

Micromanipulator’s newest brand, our Mechatronics probe stations, are ideal for a wide variety of applications. Mechatronics probers are designed by the same team of talented engineers who design our state-of-the-art Micromanipulator line, and are perfect for budget-conscious system users looking for stable, reliable performance. In addition the Mechatronics Ace can be ordered from our online store and is available with a choice of high quality accessories and consumables. 

One of the accessory choices for the Mechatronics includes two microscope options – our Binocular microscope (ACE-SCP-BINO) and the Trinocular microscope (ACE-SCP-TRI). Both of the microscopes provide a wide field of view and long working distances as well as offer a StereoZoom on a super flexible boom stand for more than 6″x 6″ (150x 150mm) X-Y positioning. Please note that the Binocular microscope does not support camera mounting while the Trinocular microscope does. 

Our Mechatronics probe stations also have a choice of either a magnetic or vacuum manipulator (formerly the Micromanipulator 110/210). Available in either a left hand or right hand version, the XYZ controls face forward when placed on right side of probing setup. An optional MINI-VAC vacuum pump is designed for our Mechatronics accessories and/or an ACE-VAC-PUC collection plate.

When you order a Mechatronics Ace, you will have the opportunity to select a Single Wire (Pair) (ACE-PRB-HLDR-S) or Coaxial (Pair) (ACE-PRB-HLDR-C) probe holder, or to just skip that step altogether. At the same time, you can also order Mechatronics ACE Probe Tips (ACE-PRB-TIP-B) in the amount you need. 

Please visit our website to learn more about our high-quality probe stations and all of our excellent choices in accessories and consumables. Our engineers are ready to answer any questions you may have and can be contacted via phone or email. 

Micromanipulator not only invented analytical probing in 1956 but we are leaders in the field and reliably deliver the tools and life cycle support the semi-conductor industry depends on. Our company’s philosophy and what drives our success is an unfaltering commitment to our customers’ satisfaction. For one of the most comprehensive selections of probe stations, consumables and accessories on the market, please see our website.