Exclusive Thermal Wafer Chuck Systems

At Micromanipulator we not only design, engineer and manufacture the highest quality and range of probe stations, but also offer our customers the best selection of accessories.  Our accessories include our top-rated thermal wafer chuck systems that allow you the opportunity to configure your probe station to meet performance, budget and probing application requirements. 

Our exclusive wafer chucks offer a range of features such as rapidly heating up and cooling down; minimizing expansion into the probes; maintaining incredible planarity over temperature changes with our Frictionless Kinematic Mount; and minimizing heat radiation into the stage to prolong prober life.   Micromanipulator’s hot chuck systems support wafer testing from -65 to 400 degrees and are available with a choice of the heating power supply.  We recommend an AC heating supply for customers that need fast heating and do not require chuck noise in the femtoamp level.   If you need to achieve the lowest level measurements, go with our DC power supply.  All of our hot chucks are capable of supporting 150 to 300 mm wafers in coaxial or triaxial configurations.

If you want the most economical cooling for above ambient testing, we suggest the C1000 simple heat exchange (HE) option that offers the benefit of rapid cooling of the chuck after the heat cycle is finished.  If you need to test to zero degrees and want the best performance in holding temperatures at room ambient temperatures, you will want to take a look at our C1000 zero degree cooling option.  Finally our line-up includes the HC1000 high performance cooling system.  It is specifically designed to handle testing for temperatures as low as -65 degrees C.   For all the information regarding our thermal wafer chucks as well as our other high-quality accessories, please see our website or contact one of our engineers. 

Micromanipulator not only invented analytical probing in 1956 but we are the leading name in the field. We reliably deliver the tools and life cycle support the semiconductor industry depends on. Part of our company’s philosophy and what drives our success is an unfaltering commitment to our customers’ satisfaction. We offer the most comprehensive range of accessories available anywhere including our exclusive H1000 series thermal wafer chuck.