Hot Stage Probing Techniques Discussed in our Application Notes

The Micromanipulator Company takes great pride in manufacturing the finest equipment available for probing small geometries.  In addition, we spend considerable energy on trying to solve application problems, of which our customers can find comprehensive information on a range of topics under our Application Notes.  

One example we discuss in detail is “Hot Stage Probing Techniques” and the problem of using a hot stage for elevated temperature probing or CV measurement.  Micromanipulator explores the issue of movement of a device under the probe and the probe point due to thermal expansion. Furthermore, we present a solution for the relatively common probing dilemma of maintaining probe contact during temperature stressing of wafers, which can compound the natural difficulties already associated with probing.  Our Application Note is a thorough analysis of the causes and effects of the problem while offering an equipment solution.   

Part of our advice includes discussing the merits of several of our probe holders and the advantages each one offers.   As with all forms of probing small geometries, we suggest that, “a little technique can go a long way” and that with some experimenting, each operator will find the most suitable probing angle and/ or technique. 

We provide a few easy to follow guidelines that include:  probe as close to vertical as possible; use a 7F style probe tip with a small diameter and one that is as long as possible; when making probe contact, continue lowering the probe until bowing or flexure of probe tip is seen.  Also we recommend that users verify bowing by using a little X or Y-motion of manipulator or stage.  Be sure the probe contact follows the motion and stays on the target site.  Our last suggestion is to remind users that practice will make it better.   

Micromanipulator not only invented analytical probing in 1956 but we remain the leading name in the field.  As such we reliably deliver the tools and life cycle support the semiconductor industry depends on.  As part of our company’s philosophy and what drives our success is an unfaltering commitment to customers’ satisfaction.  We invite you to contact us to find out more about our wide range of probe stations, accessories and consumables.