Hot Chuck Systems with Options

As an industry leader, Micromanipulator engineers and manufactures the best range of high-quality probe stations.  We also produce a wide variety of compatible accessories designed for our stations including hot chuck systems that offer the broadest available temperature range and the most advanced, non-operator dependent performance on the market. 

Micromanipulator’s thermal chuck systems support wafer configurations to fit your application and budget and offer features such as rapidly heating up and cooling down.  They will also minimize expansion into the probes; maintain incredible planarity over temperature changes with our Frictionless Kinematic Mount; and minimize heat radiation into the stage that helps to prolong your prober’s life.   

Our innovative hot chuck systems support wafer testing from -65 to 400 C degrees and come with a choice of a heating power supply.  If you need fast heating and do not require chuck noise in the femtoamp level, we suggest you chose an AC heating supply.  It is best to go with our DC power supply if you need to achieve the lowest level measurements.  Regardless of which one you choose, all of our hot chucks are capable of supporting 150 to 300mm wafers in coaxial or triaxial configurations.

We recommend the C1000 simple heat exchange (HE) option if you want the most economical cooling for above ambient testing as it offers the benefit of a rapid cooling of the chuck after the heat cycle is finished.  If you need to test to zero degrees, and require the best performance in holding temperatures at room ambient temperatures, your best choice is our C1000 zero degree cooling option. 

For the highest performance, we recommend our exclusive HC1000, which is specifically designed to handle testing for temperatures as low as -65 degrees C.  It provides the best planarity, lowest noise, and lowest cost of ownership, and all control options work with our probing specialized thermal chuck.

Our wide range of products allows you to configure your probe station to meet performance, budget and probing application requirements.  Please visit our website to learn more. 

Micromanipulator not only invented analytical probing in 1956 but we are the leading name in the field. We reliably deliver the tools and life cycle support the semiconductor industry depends on. Part of our company’s philosophy and what drives our success is an unfaltering commitment to our customers’ satisfaction. We offer the most comprehensive range of accessories available anywhere including our exclusive H1000 series thermal wafer chuck.