Thermal Chuck Systems for a Range of Testing Needs

Along with Micromanipulator’s excellent choice of probe stations, we also offer customers the best selection of accessories to ensure their success.  Our wafer chucks are one example.  Our company is responsible for pioneering the integration of thermal chucks with probe stations, and today we provide our customers with high-quality products that offer comprehensive system integration. 

Our thermal chucks offer the broadest temperature range and the most advanced non-operator dependent performance on the market today including rapid heat up and cool down features.  They are also designed to minimize expansion into the probes and heat radiation into the stage to prolong prober life and our Frictionless Kinematic Mount maintains incredible planarity over temperature changes.  

Designed to support wafer testing from -65 to 400 degrees, Micromanipulator’s hot chuck systems offers an AC heating supply for customers that need fast heating and do not require chuck noise in the femtoamp level.   For those that need to achieve the lowest level measurements, we recommend you chose the DC power supply.  Any one of our hot chucks is capable of supporting 150 to 300 mm wafers in coaxial or triaxial configurations. 

For the most economical cooling for above ambient testing, we suggest the C1000 simple heat exchange (HE) option as it offers the advantage of rapid cooling of the chuck once the heat cycle is finished.  If you want the best performance in holding temperatures at room ambient temperatures and need to test to zero degrees, we advise that you consider our C1000 zero degree cooling option.  To handle testing for temperatures as low as -65 degrees C, you will want to take a look at the HC1000 high performance cooling system, which was specifically designed for the task.   

Visit our website to find products that allow you to configure your probe station to meet your performance, budget and probing application requirements.  In addition to our thermal chucks, we have wide assortment of other high-quality accessories and consumables.   

Micromanipulator not only invented analytical probing in 1956 but we remain the leading name in the field.  As such we reliably deliver the tools and life cycle support the semiconductor industry depends on.  As part of the company’s philosophy and what drives our success is an unfaltering commitment to customers’ satisfaction.  Please contact us to find out more about our exceptional line of probe stations and accessories.