Wafer Chucks with the Broadest Temperature Range on the Market

The Micromanipulator Company has a reputation throughout the world for innovation and high-quality products.  Our customers feel confident purchasing from us as they know we stand behind our products and will still be around for many years in the future to help out with any problems.   

Our team proudly provides the semiconductor industry with the state-of-the-art products it needs in order to develop the products of tomorrow.  By listening and learning from our customers, Micromanipulator’s probe stations as well as our accessories and consumables are the products system users trust to serve their needs.   

One product that is a perfect example of our innovative thinking is Micromanipulator’s advanced thermal wafer chuck systems.  Regardless of which one of our probe stations you purchase, our wafer chucks are designed as part of the comprehensive system integration with features that include a rapid heating up and cooling down.  Our thermal chucks minimize expansion into the probes and heat radiation into the stage to help prolong the prober life.  Micromanipulator’s chucks also maintain incredible planarity over temperature changes with our Frictionless Kinematic Mount.   

Designed to support wafer testing from -65 to 400 degrees, our wafer chuck systems have a choice of AC and DC heating power supply.  If you do not require chuck noise in the femtoamp level and need fast heating, our recommendation is to go with an AC heating supply.  The DC power supply is for applications that need to achieve the lowest level measurements.  Furthermor, Micromanipulator’s quality hot chucks are designed to support 150 to 300 mm wafers in either coaxial or triaxial configurations. 

For the best planarity, lowest noise and lowest cost of ownership, we proudly offer our customers the exclusive H1000 series thermal chuck.  Along with having several configurations to meet your application and budget needs, all control options will work with our specialized thermal chuck.  From our most economical C1000 simple heat exchange (HE) option for above ambient testing to our high performance HC1000 system that can handle testing for temperatures as low as -65 degrees C., Micromanipulator has it.  Please see our website for more information.   

At Micromanipulator, we not only invented analytical probing in 1956 but are still the top name in the field.  As such we reliably deliver the tools and life cycle support the semiconductor industry depends on.  A key part of our company’s philosophy and what drives our success is an unfaltering commitment to customers’ satisfaction.  Please contact us to learn more about our excellent range of probe stations and accessories.