Tips for Dealing with Uncontrolled Movement When Probing

At the Micromanipulator Company, we have always based our success on that of our customers. By listening (and learning) to our customers, we have been able to explore and develop solutions to a range of common and sometimes not so common problems encountered during the wafer probing process. 

One such problem is uncontrolled movement that causes the probe to slide or jump off its contact when using a hot stage at extremely elevated temperatures or for CV measurement. (You will find detailed information on this topic in one of Application Notes under our website’s “About” tab.) While likely due to thermal expansion, research has found that for every 100 ºC temperature change, the movement may account for as much as one mil at any given location. On a six or eight-inch wafer, this type of movement may affect your testing results. 

As a way to solve these problems, we offer equipment solutions such as our high compliance 7F probe point. The 7F’s very fine wire tip flexes and is designed to follow a target device as it moves in the X, Y, Z axes. The high temperature, bendable shank and tip offers the largest radius for probe contact as well as the shortest conical taper length to minimize the skating or slipping effect of the probe tip on the wafer site. Using it with a small amount of flexure on the tip and at the near vertical angle of about 80o ± 5o, it is steep enough for the application and still visible under the microscope. 

Micromanipulator works hard to find solutions to application problems and is proud to bring customers the finest equipment on the market for probing small geometries. For your convenience, the 7F Tungsten Cat Whisker Probe Tip is available at our online store. Please visit our website to see our full line of probe tips and probe holders as well as our probe stations and accessories. 

Micromanipulator not only invented analytical probing in 1956 but we are the leading name in the field and reliably deliver the tools and life cycle support the semiconductor industry depends on. Our company’s philosophy and what drives our success is an unfaltering commitment to our customers’ satisfaction. You will find one of the most comprehensive ranges of probe stations on the market as well the consumables, accessories and on-site support you need.